JPS6254284U - - Google Patents
Info
- Publication number
- JPS6254284U JPS6254284U JP14511785U JP14511785U JPS6254284U JP S6254284 U JPS6254284 U JP S6254284U JP 14511785 U JP14511785 U JP 14511785U JP 14511785 U JP14511785 U JP 14511785U JP S6254284 U JPS6254284 U JP S6254284U
- Authority
- JP
- Japan
- Prior art keywords
- cryogenic panel
- cryogenic
- panel
- cryohead
- cryoengine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
第１図は本考案の一実施例であるクライオポン
プを示す縦断面図である。
１……ポンプ室、２……クライオエンジン、３
……クライオヘツド、４，７，８……深冷パネル
、Ａ，Ｂ……通路、Ｃ……袋小路。
FIG. 1 is a longitudinal sectional view showing a cryopump which is an embodiment of the present invention. 1... Pump room, 2... Cryo engine, 3
...Cryohead, 4,7,8...Cryogenic panel, A, B...Aisle, C...Desac.
Claims (1)
イオヘツドの頂面に深冷パネルを備える式のもの
において、前記深冷パネルに対向する第２の深冷
パネルを前記クライオヘツドに設け、前記深冷パ
ネルと前記第２の深冷パネルとで、吸着除去しよ
うとする物質を前記深冷パネルと前記第２の深冷
パネルとの奥に導く通路を形成したことを特徴と
するクライオポンプ。 In a pump chamber equipped with a cryogenic panel on the top surface of a cryohead extending from a cryoengine, a second cryogenic panel facing the cryogenic panel is provided on the cryohead, and the cryogenic panel and the first cryogenic panel are disposed opposite to the cryogenic panel. A cryopump characterized in that a passageway is formed with a second cryogenic panel to guide a substance to be adsorbed and removed deep between the cryogenic panel and the second cryogenic panel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14511785U JPS6254284U (en) | 1985-09-25 | 1985-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14511785U JPS6254284U (en) | 1985-09-25 | 1985-09-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6254284U true JPS6254284U (en) | 1987-04-03 |
Family
ID=31056357
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14511785U Pending JPS6254284U (en) | 1985-09-25 | 1985-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6254284U (en) |
-
1985
- 1985-09-25 JP JP14511785U patent/JPS6254284U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6254284U (en) | ||
| JPS6230016U (en) | ||
| JPS62130200U (en) | ||
| JPS63104628U (en) | ||
| JPS6279871U (en) | ||
| JPS6279986U (en) | ||
| JPS6336774U (en) | ||
| JPS6260798U (en) | ||
| JPH0447137U (en) | ||
| JPS6286474U (en) | ||
| JPS6421298U (en) | ||
| JPS5874854U (en) | Chair | |
| JPS6282384U (en) | ||
| JPH01138421U (en) | ||
| JPS61143923U (en) | ||
| JPH02122183U (en) | ||
| JPS6175768U (en) | ||
| JPS6118248U (en) | Adsorption device | |
| JPS61177104U (en) | ||
| JPS632891U (en) | ||
| JPS60162253U (en) | Throttle chamber icing prevention device | |
| JPS58114957U (en) | three-way valve | |
| JPS6162563U (en) | ||
| JPH0327667U (en) | ||
| JPH01134759U (en) |