JPS6253233U - - Google Patents

Info

Publication number
JPS6253233U
JPS6253233U JP14472785U JP14472785U JPS6253233U JP S6253233 U JPS6253233 U JP S6253233U JP 14472785 U JP14472785 U JP 14472785U JP 14472785 U JP14472785 U JP 14472785U JP S6253233 U JPS6253233 U JP S6253233U
Authority
JP
Japan
Prior art keywords
fluid
conveyance body
conveying
conveyance
blades
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14472785U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0322177Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985144727U priority Critical patent/JPH0322177Y2/ja
Publication of JPS6253233U publication Critical patent/JPS6253233U/ja
Application granted granted Critical
Publication of JPH0322177Y2 publication Critical patent/JPH0322177Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP1985144727U 1985-09-21 1985-09-21 Expired JPH0322177Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985144727U JPH0322177Y2 (enrdf_load_stackoverflow) 1985-09-21 1985-09-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985144727U JPH0322177Y2 (enrdf_load_stackoverflow) 1985-09-21 1985-09-21

Publications (2)

Publication Number Publication Date
JPS6253233U true JPS6253233U (enrdf_load_stackoverflow) 1987-04-02
JPH0322177Y2 JPH0322177Y2 (enrdf_load_stackoverflow) 1991-05-15

Family

ID=31055598

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985144727U Expired JPH0322177Y2 (enrdf_load_stackoverflow) 1985-09-21 1985-09-21

Country Status (1)

Country Link
JP (1) JPH0322177Y2 (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4933469A (enrdf_load_stackoverflow) * 1972-07-28 1974-03-27
JPS5185489U (enrdf_load_stackoverflow) * 1974-12-27 1976-07-08
JPS5353273U (enrdf_load_stackoverflow) * 1976-10-07 1978-05-08

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4933469A (enrdf_load_stackoverflow) * 1972-07-28 1974-03-27
JPS5185489U (enrdf_load_stackoverflow) * 1974-12-27 1976-07-08
JPS5353273U (enrdf_load_stackoverflow) * 1976-10-07 1978-05-08

Also Published As

Publication number Publication date
JPH0322177Y2 (enrdf_load_stackoverflow) 1991-05-15

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