JPS6252929U - - Google Patents

Info

Publication number

JPS6252929U

JPS6252929U JP14469585U JP14469585U JPS6252929U JP S6252929 U JPS6252929 U JP S6252929U JP 14469585 U JP14469585 U JP 14469585U JP 14469585 U JP14469585 U JP 14469585U JP S6252929 U JPS6252929 U JP S6252929U

Authority

JP

Japan

Prior art keywords

tray

wafers

wafer

shape memory

memory alloy

Prior art date

1985-09-21

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 235000012431 wafers Nutrition 0.000 claims description 7
• 229910001285 shape-memory alloy Inorganic materials 0.000 claims description 3
• 238000004519 manufacturing process Methods 0.000 claims 1
• 238000000034 method Methods 0.000 claims 1
• 239000004065 semiconductor Substances 0.000 claims 1
• 238000001947 vapour-phase growth Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3
• 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 1

Cited By (3)