JPS6252830U - - Google Patents
Info
- Publication number
- JPS6252830U JPS6252830U JP14444485U JP14444485U JPS6252830U JP S6252830 U JPS6252830 U JP S6252830U JP 14444485 U JP14444485 U JP 14444485U JP 14444485 U JP14444485 U JP 14444485U JP S6252830 U JPS6252830 U JP S6252830U
- Authority
- JP
- Japan
- Prior art keywords
- pressure adjustment
- adjustment chamber
- clean room
- room
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Cleaning In General (AREA)
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14444485U JPS6252830U (fi) | 1985-09-20 | 1985-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14444485U JPS6252830U (fi) | 1985-09-20 | 1985-09-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6252830U true JPS6252830U (fi) | 1987-04-02 |
Family
ID=31055051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14444485U Pending JPS6252830U (fi) | 1985-09-20 | 1985-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6252830U (fi) |
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1985
- 1985-09-20 JP JP14444485U patent/JPS6252830U/ja active Pending