JPS6251765U - - Google Patents

Info

Publication number

JPS6251765U

JPS6251765U JP14216185U JP14216185U JPS6251765U JP S6251765 U JPS6251765 U JP S6251765U JP 14216185 U JP14216185 U JP 14216185U JP 14216185 U JP14216185 U JP 14216185U JP S6251765 U JPS6251765 U JP S6251765U

Authority

JP

Japan

Prior art keywords

diaphragm

piezoresistance

light shielding

piezoresistor

covers

Prior art date

1985-09-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
• 239000004065 semiconductor Substances 0.000 claims 1
• 229910052710 silicon Inorganic materials 0.000 claims 1
• 239000010703 silicon Substances 0.000 claims 1
• 239000008188 pellet Substances 0.000 description 1