JPS6251738U - - Google Patents
Info
- Publication number
- JPS6251738U JPS6251738U JP14276985U JP14276985U JPS6251738U JP S6251738 U JPS6251738 U JP S6251738U JP 14276985 U JP14276985 U JP 14276985U JP 14276985 U JP14276985 U JP 14276985U JP S6251738 U JPS6251738 U JP S6251738U
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- silicon raw
- liquid silicon
- diameter
- carrier gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 6
- 239000002994 raw material Substances 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- 239000012159 carrier gas Substances 0.000 claims description 5
- 238000007664 blowing Methods 0.000 claims 1
- 230000005587 bubbling Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14276985U JPS6251738U (nl) | 1985-09-20 | 1985-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14276985U JPS6251738U (nl) | 1985-09-20 | 1985-09-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6251738U true JPS6251738U (nl) | 1987-03-31 |
Family
ID=31051812
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14276985U Pending JPS6251738U (nl) | 1985-09-20 | 1985-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6251738U (nl) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003516304A (ja) * | 1999-12-11 | 2003-05-13 | エピケム リミテッド | 前駆物質を複数のエピタキシャル・リアクター部に供給するための方法および装置 |
-
1985
- 1985-09-20 JP JP14276985U patent/JPS6251738U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003516304A (ja) * | 1999-12-11 | 2003-05-13 | エピケム リミテッド | 前駆物質を複数のエピタキシャル・リアクター部に供給するための方法および装置 |
| JP2011137235A (ja) * | 1999-12-11 | 2011-07-14 | Sigma Aldrich Co | 有機金属前駆物質を複数のエピタキシャル・リアクター部にバルク供給するための方法 |