JPS6251649U - - Google Patents

Info

Publication number
JPS6251649U
JPS6251649U JP14324885U JP14324885U JPS6251649U JP S6251649 U JPS6251649 U JP S6251649U JP 14324885 U JP14324885 U JP 14324885U JP 14324885 U JP14324885 U JP 14324885U JP S6251649 U JPS6251649 U JP S6251649U
Authority
JP
Japan
Prior art keywords
exhaust hole
electrodes
electrostatic lens
einzel
electric field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14324885U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14324885U priority Critical patent/JPS6251649U/ja
Publication of JPS6251649U publication Critical patent/JPS6251649U/ja
Pending legal-status Critical Current

Links

JP14324885U 1985-09-18 1985-09-18 Pending JPS6251649U (US06826419-20041130-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14324885U JPS6251649U (US06826419-20041130-M00005.png) 1985-09-18 1985-09-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14324885U JPS6251649U (US06826419-20041130-M00005.png) 1985-09-18 1985-09-18

Publications (1)

Publication Number Publication Date
JPS6251649U true JPS6251649U (US06826419-20041130-M00005.png) 1987-03-31

Family

ID=31052750

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14324885U Pending JPS6251649U (US06826419-20041130-M00005.png) 1985-09-18 1985-09-18

Country Status (1)

Country Link
JP (1) JPS6251649U (US06826419-20041130-M00005.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001345260A (ja) * 2000-03-31 2001-12-14 Canon Inc 電子光学系アレイ及びその製造方法、荷電粒子線露光装置、並びに、デバイスの製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001345260A (ja) * 2000-03-31 2001-12-14 Canon Inc 電子光学系アレイ及びその製造方法、荷電粒子線露光装置、並びに、デバイスの製造方法

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