JPS625153A - Optical gas analyzer - Google Patents

Optical gas analyzer

Info

Publication number
JPS625153A
JPS625153A JP60142425A JP14242585A JPS625153A JP S625153 A JPS625153 A JP S625153A JP 60142425 A JP60142425 A JP 60142425A JP 14242585 A JP14242585 A JP 14242585A JP S625153 A JPS625153 A JP S625153A
Authority
JP
Japan
Prior art keywords
light
cells
cell
optical
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60142425A
Other languages
Japanese (ja)
Other versions
JPH0347700B2 (en
Inventor
Kenji Akimoto
健二 秋本
Akira Tsuji
辻 明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KOUMIYOU RIKAGAKU KOGYO KK
Original Assignee
KOUMIYOU RIKAGAKU KOGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KOUMIYOU RIKAGAKU KOGYO KK filed Critical KOUMIYOU RIKAGAKU KOGYO KK
Priority to JP60142425A priority Critical patent/JPS625153A/en
Publication of JPS625153A publication Critical patent/JPS625153A/en
Publication of JPH0347700B2 publication Critical patent/JPH0347700B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE:To compensate for a zero-point drift generated with changes in the attitude, by arranging more than one measuring cells and reference cells on a circumference centered on one shaft alternately to make light incident upon a photo detector alternately as passing through the cells with the rotation of a light chopper. CONSTITUTION:Four measuring cells M and four reference cells S are arranged at an equal interval alternately to be point symmetrical on the center axis. Light from a light source 1 is made parallel to the center axis with a mirror 5 to enter the measuring cells M1 and M3 passing through a light-transmitting plate 7. A gas to be analyzed runs into the measuring cells M through a path P and a measuring light enters a photo detector 3 passing through a light- transmitting plate 8, light passing hole H of a light chopper 2 and then, a mirror 6 and a bandpass filter 4. Then, the light chopper 2 is turned with a motor 9 to intercept the measuring cells M so that light is allowed to pass through the reference cells S positionally to focus each light on the photo detector 3.

Description

【発明の詳細な説明】 〔概 要〕 各n個(ただしn≧2)の測定セルおよび基準セルを交
互に配置し、これらのセルを通過した光を交互に光検出
器に入射させて、光学的ガス分析計のゼロ点ドリフトを
補償する。
[Detailed Description of the Invention] [Summary] N measurement cells and reference cells (where n≧2) are arranged alternately, and the light passing through these cells is alternately made incident on a photodetector. Compensating for zero point drift in optical gas analyzers.

〔産業上の利用分野〕[Industrial application field]

本発明は光学的ガス分析計、特にゼロ点ドリフトを補償
するガス分析計に関する。
The present invention relates to optical gas analyzers, and more particularly to gas analyzers that compensate for zero point drift.

〔従来技術および発明が解決しようとする問題点〕従来
の光学的ガス分析計は、1個または複数個の測定セルお
よび1個の基準セルならびに光検出器から構成され、測
定時には、1個の測定セルおよび1個の基準セルを対と
して、両セルを交互に通過した光を光検出器に入射させ
て、測定光と基準光との強度の差または比を検出する。
[Prior Art and Problems to be Solved by the Invention] A conventional optical gas analyzer is composed of one or more measurement cells, one reference cell, and a photodetector. A measurement cell and one reference cell are used as a pair, and the light that has alternately passed through both cells is incident on a photodetector to detect the difference or ratio in intensity between the measurement light and the reference light.

複数個の測定セルおよび1個の基準セルを有するガス分
析計は、たとえば実開昭58−109054号および米
国特許第3,743.426号に開示されているが、前
者は各測定セルに異なるガスを導入するものであり、後
者は各測定セルに一つのガスを直列に導入するものであ
る。しかしこのようなガス分析計は、光源の温度分布の
変化、光検出器の感度分布の変化、またはミラーの反射
率分布の変化などによって測定光と基準光との強度の差
または比が変化するときに、分析計のゼロ点ドリフトを
生じる。
Gas analyzers with multiple measuring cells and one reference cell are disclosed, for example, in Japanese Utility Model Application No. 58-109054 and U.S. Pat. No. 3,743,426; The latter introduces one gas in series into each measuring cell. However, in such gas analyzers, the difference or ratio between the intensity of the measurement light and the reference light changes due to changes in the temperature distribution of the light source, changes in the sensitivity distribution of the photodetector, or changes in the reflectance distribution of the mirror. This sometimes causes the zero point drift of the analyzer.

このようなゼロ点ドリフトが従来型分析計においておき
る例として、光学系の姿勢変化にともなうゼロ点ドリフ
トについて説明する。光源の温度分布は、周囲に存在す
る気体の熱対流によって光源の上部が下部より温度が高
くなる。したがって、光源の上部から放射される光の方
が下部から放射される光よりも強くなる。第4図の例で
は、分析計が直重な場合(A)は測定セルMに入射する
光と基準セルSに入射する光とが等しい強さとなるが、
分析計が水平な場合(B)は測定セルMに入射する光よ
りも基準セルSに入射する光の方が強くなる。
As an example of such a zero point drift occurring in a conventional analyzer, a zero point drift due to a change in the attitude of the optical system will be explained. The temperature distribution of the light source is such that the upper part of the light source is higher in temperature than the lower part due to thermal convection of the surrounding gas. Therefore, the light emitted from the top of the light source is stronger than the light emitted from the bottom. In the example of FIG. 4, when the analyzers are stacked vertically (A), the light incident on the measurement cell M and the light incident on the reference cell S have the same intensity, but
When the analyzer is horizontal (B), the light incident on the reference cell S is stronger than the light incident on the measurement cell M.

〔問題点を解決するための手段〕[Means for solving problems]

上記問題点は、長さの等しい測定セルおよび基準セルな
らびに光検出器を有し、同一光源の光を測定セルに通過
させた測定光と、基準セルに通過させた基準光とを交互
に光検出器に入射させるように配置した光学的ガス分析
計であって、各n個(ただしn≧2)の測定セルMおよ
び基準セルSを、一つの軸を中心とする円周上に交互に
配置し、各測定セルMに同一の試料ガスを同時に導入す
るためのガス通路Pを設け、光通過孔Hを穿った光チロ
ツバ2を前記軸を中心として回転可能に設け、かつこれ
らの測定セルMまたは基準セルSに通過させた光を交互
に光検出器3に入射させるようにミラー5,6を配置し
たことを特徴とする光学的ガス分析計によって解決する
ことができる。
The above problem is that the measurement cell, the reference cell, and the photodetector are of equal length, and the measurement light that is passed from the same light source through the measurement cell and the reference light that is passed through the reference cell are alternately illuminated. An optical gas analyzer arranged so as to be incident on a detector, in which n measurement cells M and reference cells S are arranged alternately on a circumference centered on one axis. a gas passage P for introducing the same sample gas into each measurement cell M at the same time, an optical filter 2 having a light passage hole H provided therein so as to be rotatable about the axis; This problem can be solved by an optical gas analyzer characterized in that mirrors 5 and 6 are arranged so that the light passed through M or the reference cell S is alternately incident on the photodetector 3.

光チョッパ2の光通過孔Hは測定セルMまたは基準セル
Sに対応する位置にn個(ただしn≧2)穿たれている
ことが有利である。また、光チョッパ2の光通過孔Hは
1個だけ穿たれていることもできる。
Advantageously, the light chopper 2 has n light passage holes H (n≧2) at positions corresponding to the measurement cells M or the reference cells S. Further, the optical chopper 2 may have only one light passing hole H.

光源1の温度分布の変化、ミラー5.6の汚れなどによ
る反射率分布の変化、光学系の機械的変位などが生じた
場合には、隣接する測定セルMと基準セルSを通過する
測定光と基準光に対応する電気信号には同一傾向の変化
が生じるため互いの強度比がほぼ一定に保たれ、ゼロ点
のドリフトが補償される。
If there is a change in the temperature distribution of the light source 1, a change in the reflectance distribution due to dirt on the mirror 5.6, mechanical displacement of the optical system, etc., the measurement light passing through the adjacent measurement cell M and reference cell S will change. Since the electrical signals corresponding to the reference light and the reference light undergo changes with the same tendency, the mutual intensity ratio is kept almost constant, and the drift of the zero point is compensated for.

さらに、分析計の姿勢を変えたときのように、分析計の
中心軸に対して点対称の位置にある同種のセルの通過光
強度の変化が互いに反対傾向に生じる場合は同種の各セ
ルに対応する電気信号の和においては、はとんど変化し
ないため、隣接する異種の通過光に対応する電気信号の
強度比が一定化される効果と相まって、ゼロ点のドリフ
トが補償される。
Furthermore, if the intensity of light passing through cells of the same type at positions symmetrical to the central axis of the analyzer tends to change in opposite directions, such as when changing the orientation of the analyzer, each cell of the same type Since the sum of the corresponding electric signals hardly changes, the drift of the zero point is compensated for in combination with the effect that the intensity ratio of the electric signals corresponding to adjacent different types of passing light is constant.

このような効果はセルの数が多い程、また異種セルが相
互に接近している程、ますます有効である。なお測定セ
ルM、基準セルSおよび光チョッパの光通過孔Hの断面
形状は第1図および第2図(A)、(B)においては円
形であるが、これに限るものでなく、長円形、だ円形、
矩形、扇形としてもよい。
This effect becomes more effective as the number of cells increases and as the different types of cells approach each other. Note that the cross-sectional shapes of the measurement cell M, the reference cell S, and the light passage hole H of the optical chopper are circular in FIGS. 1 and 2 (A) and (B), but are not limited to this, and may be oval. , oval,
It may be rectangular or fan-shaped.

〔実施例〕〔Example〕

実施例1 本発明の分析計の一つの実施態様として第1図に示すよ
うに、4個の測定セルMおよび4個の基準セルSを交互
に等間隔に配置し、4個の測定セルMおよび基準セルS
はそれぞれ各対が中心軸について点対称の位置にある。
Example 1 As an embodiment of the analyzer of the present invention, as shown in FIG. 1, four measurement cells M and four reference cells S are arranged alternately at equal intervals, and the four measurement cells M and reference cell S
Each pair is located symmetrically about the central axis.

光チョッパ2は第2図Aに示すように、測定セルMまた
は基準セルSに対応する位置に4個の光通過孔Hを有す
る。第3図Aはこの分析計の断面図であって、光源1か
ら発した光はミラー5によって中心軸に平行となり、光
透過板7を通って測定セルJ、およびM、に入る。図示
しない測定セルM2およびM4についても同様である。
As shown in FIG. 2A, the optical chopper 2 has four light passage holes H at positions corresponding to the measurement cell M or the reference cell S. FIG. 3A is a cross-sectional view of this analyzer, in which the light emitted from the light source 1 is made parallel to the central axis by the mirror 5, passes through the light transmitting plate 7, and enters the measurement cells J and M. The same applies to measurement cells M2 and M4 (not shown).

測定セルMには分析すべきガスがガス通路Pを通って流
入し、各測定セルを通った測定光は光透過板8を通り、
光チョッパ2の光通過孔Hを通過し、ミラー6で集光さ
れ、バンドパスフィルタ4を通して光検出器3に入る。
The gas to be analyzed flows into the measurement cell M through the gas passage P, and the measurement light that has passed through each measurement cell passes through the light transmission plate 8.
The light passes through the light passage hole H of the light chopper 2, is focused by the mirror 6, passes through the bandpass filter 4, and enters the photodetector 3.

この間、基準セルSは光チョッパ2に遮られるので基準
光は光検出器3に入らない。
During this time, the reference cell S is blocked by the optical chopper 2, so that the reference light does not enter the photodetector 3.

次に光チョッパ2をモータ9で回転させて、測定セルM
を遮断して各基準セルSに光を通す位置とし、光検出器
3に各基準光を集光する。
Next, the optical chopper 2 is rotated by the motor 9, and the measurement cell M is
It is set at a position where the light is blocked and passes through each reference cell S, and each reference light is focused on the photodetector 3.

光検出器3からの電気信号は、各測定セルおよび各基準
セルに対応する各測定信号および各基準信号が交互に時
系列信号として得られるので、これらの信号のうち、測
定信号の和と基準信号の和を比べることによってガス濃
度分析が行われる。
The electric signal from the photodetector 3 is obtained as a time-series signal in which each measurement signal and each reference signal corresponding to each measurement cell and each reference cell are obtained alternately. Gas concentration analysis is performed by comparing the sum of the signals.

実施例2 本発明の分析計の他の実施態様は、光チョッパ2の光通
過孔Hの数が1個であることのみが実施例1と異なる構
造を有する。分析計の断面図を第3図(B)に示す。ま
た光通過孔Hの数が1個の光チヨツパを第2図(B)に
示す。1個の光通過孔Hを穿った光チョッパ2を軸を中
心として回転可能に設け、各測定セルMと各基準セルS
を通過させた光を集めて、交互に光検出器3に入射させ
る。光検出器3からの電気信号を比較して、ガス濃度分
析を行なう操作は実施例1と同様である。
Example 2 Another embodiment of the analyzer of the present invention has a structure that differs from Example 1 only in that the number of light passage holes H in the optical chopper 2 is one. A cross-sectional view of the analyzer is shown in FIG. 3(B). Further, an optical chopper having one light passage hole H is shown in FIG. 2(B). An optical chopper 2 with one optical passage hole H is provided rotatably around an axis, and each measuring cell M and each reference cell S
The light that has passed is collected and made to alternately enter the photodetector 3. The operation of comparing electrical signals from the photodetector 3 and performing gas concentration analysis is the same as in the first embodiment.

〔発明の効果〕〔Effect of the invention〕

本発明の光学的ガス分析計は姿勢変化によるゼロ点ドリ
フトがほとんどないので携帯型とすることができ、また
温度が変化してもゼロ点ドリフトが軽減されるので恒温
槽など温度制御装置が不要となり、さらにミラーなどの
汚れにもとづく経時的なゼロ点ドリフトがほとんど補償
されるので、長期かつ連続して使用する場合も手動また
は自動装置によるゼロ点調整作業が不要となり、高性能
で小型化し、しかも動作を安定させることができる。
The optical gas analyzer of the present invention has almost no zero point drift due to attitude changes, so it can be made portable, and zero point drift is reduced even when the temperature changes, so there is no need for a temperature control device such as a thermostat. Moreover, since the zero point drift over time due to dirt on mirrors etc. is almost compensated for, zero point adjustment work by manual or automatic equipment is not required even when used continuously for a long period of time, resulting in high performance and compact size. Moreover, the operation can be stabilized.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の分析計の測定セルおよび基準セルの配
置を示し、第3図AおよびBのI−I線断面図であり、 第2図のAおよびBは本発明の分析計の光チョツパの光
通過孔の配置を示し、第3図AおよびBのそれぞれのn
−II 3a断面図であり、第3図は本発明の分析計の
縦断面図であり、第4図は従来型分析計の変位の説明図
である。 M・−測定セル、S−・−基準セル、P・・・ガス通路
、H・−光通過孔、1−光源、 2−光チョッパ、3−
・−光検出i、4−バンドパスフィルタ、5.6・〜ミ
ラー、7,8−・・光透過板、9・−モータ。 第1図    第2図 M−m−測定セル        H−光通過孔分析計
の断面図 第3図 1−・光源 2−光チヨソ・ぐ 3・−光検出器 4−、パンドノスフィルタ 5.6−−−ミラー 7.8−−一光透過板 9−・モータ 分析計の断面図 $3図 1・−光源 2・−光チョツパ 3−・光検出器− 4−・バンドパスフィルタ 5.6・−ミラー 7.8−−一光透過板 9−−−モータ 従来型分析計の変位の説明図 第4図 3・−光検出器      )(−一一光通過孔手続補
正書(自発) 昭和60年8月73  日 特許庁長官 宇 賀 道 部 殿 1、事件の表示 昭和60年特許願第142425号 2、発明の名称 光学的ガス分析計 3、補正をする者 事件との関係   特許出願人 名称 光明理化学工業株式会社 4、代理人 住所 〒105東京都港区虎ノ門−丁目8番lO号静光
虎ノ門ビル 電話504−07215、補正の対象 明細書の「特許請求の範囲」の欄 6、補正の内容 明細書の特許請求の範囲を別紙のとおり補正する。 7、添付書類の目録 補正特許請求の範囲        1通2、特許請求
の範囲 1、長さの等しい測定セルおよび基準セルならびに光検
出器を有し、同一光源の光を測定セルに通過させた測定
光と、基準セルに通過させた基準光とを交互に光検出器
に入射させるように配置した光学的ガス分析針であって
、 各n個(ただしn≧2)の測定セル(M)および基準セ
ル(S)を一つの軸を中心とする円周上に交互に配置し
、 各測定セル(M)に同一の試料ガスを同時に導入するた
めのガス通路(P)を設け、 光通過孔(H)を穿った光チョッパ(2)を前記軸を中
心として回転可能に設け、 かつこれらの測定セル(M)または基準セル(S)に通
過させた光を交互に光検出器(3)に入射させるように
ミラー(5,6)を配置したことを特徴とする光学的ガ
ス分析計。 2、光チョッパ(2)の光通過孔(H)は測定セル(M
)または基準セル(S)に対°応する位置にn個(ただ
しn≧2)穿たれている、特許請求の範囲第1項記載の
光学的ガス分析計。 3、光チョッパ(2)の光通過孔(H)は1側芽たれて
いる、特許請求の範囲第1項記載の光学的ガス分析計。
FIG. 1 shows the arrangement of the measuring cell and reference cell of the analyzer of the present invention, and is a sectional view taken along the line I-I of FIGS. 3A and B. FIG. The arrangement of the light passage holes of the light chopper is shown, and each n of FIG. 3A and B is
-II 3a sectional view, FIG. 3 is a longitudinal sectional view of the analyzer of the present invention, and FIG. 4 is an explanatory diagram of displacement of the conventional analyzer. M・-Measurement cell, S-・Reference cell, P...Gas passage, H・-Light passing hole, 1-Light source, 2-Light chopper, 3-
- Light detection i, 4-band pass filter, 5.6 - mirror, 7, 8 - light transmission plate, 9 - motor. Fig. 1 Fig. 2 M-m- Measuring cell H- Cross-sectional view of the light passing hole analyzer ---Mirror 7.8--One light transmission plate 9--Cross-sectional view of motor analyzer $3 Figure 1--Light source 2--Light chopper 3--Photodetector- 4--Band pass filter 5.6・-Mirror 7.8--One light transmission plate 9--MotorExplanatory diagram of displacement of conventional analyzerFigure 43・-Photodetector) August 73, 1960 Director General of the Patent Office Michibe Uga1, Indication of the case Patent Application No. 142425 of 19852, Name of the invention Optical gas analyzer3, Person making the amendment Relationship to the case Patent applicant Name: Komei Rikagaku Kogyo Co., Ltd. 4, Agent address: Shizukou Toranomon Building, 8-10 Toranomon-chome, Minato-ku, Tokyo, 105 Tel: 504-07215, Column 6 of “Claims” of the specification to be amended, Amendment Amend the claims in the description of contents as shown in the attached sheet. 7. List of attached documents amended claims 1 copy 2. Claim 1: Measuring cell and reference cell of equal length and photodetector An optical gas analysis needle arranged so that measurement light from the same light source passed through a measurement cell and reference light passed through a reference cell are alternately incident on a photodetector, N measurement cells (M) and reference cells (S) are arranged alternately on a circumference centered on one axis, and each measurement cell (M) is filled with the same sample gas. A gas passage (P) for simultaneous introduction is provided, an optical chopper (2) with a light passage hole (H) is provided rotatably about the axis, and these measurement cells (M) or reference cells ( An optical gas analyzer characterized in that mirrors (5, 6) are arranged so that the light passed through S) is alternately incident on a photodetector (3). 2. Light from an optical chopper (2) The passage hole (H) is connected to the measurement cell (M
The optical gas analyzer according to claim 1, wherein n (n≧2) holes are formed at positions corresponding to the reference cell (S) or the reference cell (S). 3. The optical gas analyzer according to claim 1, wherein the light passage hole (H) of the light chopper (2) is opened on one side.

Claims (1)

【特許請求の範囲】 1、長さの等しい測定セルおよび基準セルならびに光検
出素子を有し、同一光源の光を測定セルに通過させた測
定光と、基準セルに通過させた基準光とを交互に光検出
器に入射させるように配置した光学的ガス分析計であっ
て、 各n個(ただしn≧2)の測定セル(M)および基準セ
ル(S)を一つの軸を中心とする円周上に交互に配置し
、 各測定セル(M)に同一の試料ガスを同時に導入するた
めのガス通路(P)を設け、 光通過孔(H)を穿った光チョッパ(2)を前記軸を中
心として回転可能に設け、 かつこれらの測定セル(M)または基準セル(S)に通
過させた光を交互に光検出器(3)に入射させるように
ミラー(5、6)を配置したことを特徴とする光学的ガ
ス分析計。 2、光チョッパ(2)の光通過孔(H)は測定セル(M
)または基準セル(S)に対応する位置にn個(ただし
n≧2)穿たれている、特許請求の範囲第1項記載の光
学的ガス分析計。 3、光チョッパ(2)の光通過孔(H)は1個穿たれて
いる、特許請求の範囲第1項記載の光学的ガス分析計。
[Claims] 1. A measuring cell, a reference cell, and a photodetector element of equal length, and measuring light from the same light source passing through the measuring cell and reference light passing through the reference cell. An optical gas analyzer arranged so that the light is incident on a photodetector alternately, with n measurement cells (M) and reference cells (S) each centered on one axis (where n≧2). The gas passages (P) are arranged alternately on the circumference to introduce the same sample gas into each measurement cell (M) at the same time, and the optical choppers (2) with optical passage holes (H) are connected to the The mirrors (5, 6) are arranged so as to be rotatable about an axis, and the mirrors (5, 6) are arranged so that the light passed through the measurement cell (M) or the reference cell (S) is alternately incident on the photodetector (3). An optical gas analyzer characterized by: 2. The light passage hole (H) of the light chopper (2) is connected to the measurement cell (M
The optical gas analyzer according to claim 1, wherein n (n≧2) holes are formed at positions corresponding to the reference cell (S) or the reference cell (S). 3. The optical gas analyzer according to claim 1, wherein the optical chopper (2) has one light passage hole (H).
JP60142425A 1985-07-01 1985-07-01 Optical gas analyzer Granted JPS625153A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60142425A JPS625153A (en) 1985-07-01 1985-07-01 Optical gas analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60142425A JPS625153A (en) 1985-07-01 1985-07-01 Optical gas analyzer

Publications (2)

Publication Number Publication Date
JPS625153A true JPS625153A (en) 1987-01-12
JPH0347700B2 JPH0347700B2 (en) 1991-07-22

Family

ID=15315025

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60142425A Granted JPS625153A (en) 1985-07-01 1985-07-01 Optical gas analyzer

Country Status (1)

Country Link
JP (1) JPS625153A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5564544A (en) * 1994-04-19 1996-10-15 Kabushiki Kaisha Ace Denken Bank note conveying apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5564544A (en) * 1994-04-19 1996-10-15 Kabushiki Kaisha Ace Denken Bank note conveying apparatus

Also Published As

Publication number Publication date
JPH0347700B2 (en) 1991-07-22

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