JPS6250806A - Oil-immersed microscope for coal - Google Patents

Abstract

PURPOSE:To measure distance accurately without any adverse influence of an oil film covering a coal polished surface by providing a sensor which measures the distance between the coal polished surface and an objective and measuring the movement distance of a measuring element to the objective. CONSTITUTION:A stage 4 is fitted so that it is moved at an extremely slow sped by a stepping motor 12 in the X-axial and Y-axial directions on a plane nearly perpendicular to the optical axis 2a of the objective 2. Then, the stage 4 is moved according to a program commanded to a computer 13 through an input means 15 to measure reflection factors at many points over the nearly entire coal polished surface 8a. In this case, a sensor 19 measures the distance between the coal polished surface 8a coated with the oil film 11 and the objective 2 and a focus controller 20 performs puts a potentiometer in automatic operation on the basis of commands from the computer 13 so as to hold the measured distance of the sensor 18 constant. Consequently, the objective is prevented from becoming out of focus owing to the movement of the stage 4 and an analysis of the coal texture based upon the reflection factor distribution is taken easily and speedily and improved in reliability.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention aims to increase the reflectance of a polished coal surface covered with an oil film to the greatest extent possible in order to analyze the coal structure based on the reflectance distribution of the polished coal surface. When measuring at the measurement point.

This eliminates the need for artificial focus adjustment when changing the measurement point (
, a sensor that measures the distance between the coal polishing surface covered with an oil film on the stage and the objective lens; and a sensor that automatically adjusts the objective lens or the stage to keep the measured distance constant based on information from the sensor. The present invention relates to a microscope equipped with a movable automatic focusing means, and more particularly to an improvement of a sensor. .

[Prior art]

Conventionally, the microscope was not designed for the polished surface of coal covered with an oil film, but for dry objects to be measured, (a) Air is ejected from the nozzle toward the object to be measured, and the back pressure of the nozzle is detected. A type of sensor that measures distance based on (0) a type of sensor that emits a laser or ultrasonic wave toward an object to be measured, receives the laser or ultrasonic wave reflected from the object, and measures the time from emission to reception. A type of sensor that measures distance was used.

[Problem that the invention seeks to solve]

However, when targeting coal polished surfaces covered with oil film,
The conventional sensor described in item (a) above has the disadvantage that the microscope focuses on the surface of the oil film, which deteriorates the accuracy of measuring the reflectance of the polished coal surface. Due to the laser and ultrasonic waves reflected from the surface of the oil film, there is a risk that the surface of the oil film may be mistaken for a polished coal surface, and the accuracy of reflectance measurement tends to decrease.

An object of the present invention is to improve a sensor that measures the distance between a coal polished surface and an objective lens so that it can always accurately measure the distance without being adversely affected by the oil film covering the coal polished surface. .

Means for Solving Problem C] The characteristic configuration of the present invention is that, in forming a sensor for measuring the distance between the coal-polishing surface covered with an oil film on the stage and the objective lens, a measuring device that comes into contact with the coal-polishing surface is formed. A probe is attached to the objective lens so as to be movable in the direction of the optical axis of the objective lens and biased toward the coal polishing surface side, and a moving distance of the probe with respect to the objective lens is measured. The purpose of this invention is to provide a measuring means, and its effects are as follows.

[For production]

In other words, based on the fixed idea that microscopy should not scratch the surface of the object to be measured, pneumatic pressure,
Previously, non-contact distance measurement sensors using lasers, ultrasonic waves, etc. were used, but as a result of various experiments, the present inventors determined the reflectance of polished coal surfaces covered with oil film. A new technology that effectively prevents scratches due to the oil film even when the probe comes into contact with the polished coal surface during measurement, and there is virtually no negative effect on reflectance measurement due to scratches on the polished coal surface. I have reached an idea.

Then, the gauge head is always urged to be in contact with the polished coal surface, and is attached so that it moves relative to the objective lens when the distance between the objective lens and the coal polished surface changes, and the gauge head is attached to the objective lens. By configuring the automatic focus adjustment means to operate based on information from the means for measuring the moving distance, it is possible to determine whether the distance between the coal polishing surface and the objective lens is such that the focus of the microscope matches the coal polishing surface. The distance between the polished coal surface and the objective lens can always be accurately determined without being adversely affected by the oil film, and the focus of the microscope can be placed on the polished coal surface. I was able to keep it as it suited me.

〔Effect of the invention〕

As a result, when measuring the reflectance of a polished coal surface covered with an oil film at a large number of measurement points, automatic focus adjustment can be performed with good accuracy, and coal structure analysis based on the reflectance distribution can be performed not only easily and quickly but also reliably. Now it can be performed in a highly sexual state.

〔Example〕

Next, examples will be shown.

As shown in Figure 2, the eyepiece lens (1) and objective lens (
A microscope body (3) having a microscope body (2) and a stage (4) on which a sample is placed are attached to a base (5), and an objective lens (2) is attached to the base (5).
) and a light source device (7) are attached to the microscope body (3), and as shown in Fig. 1, coal powder and resin are mixed and hardened to form a polished coal surface (8
The sample (8) formed in a) was adhered to the coal-polished surface (8a) with oil clay (9) etc.
) is covered with an oil film (11), and the objective lens (
Coal for measuring the reflectance of the coal polished surface (8a) by placing it on the stage (4) with the coal polished surface (8a) almost perpendicular to the optical axis (2a) of 2). It is used to form an oil immersion microscope.

A stage (4) is mounted to be movable at very low speed in the X-axis direction and the Y-axis direction in a plane direction substantially perpendicular to the optical axis (2a) of the objective lens (2) using a stepping motor (12). A stage controller (1) automatically operates the stamping motor (12) based on commands.
4) is provided, and the computer (1
3) The stage (
4) is moved so that the reflectance is measured at a large number of points over almost the entire surface of the polished coal surface (8a).

Information processing means (15) that appropriately processes information from the television camera (6) and sends it to the computer (I3), and a display (16) that displays information from the computer (13).
and a recorder (17) for recording, so that measurement results can be displayed and recorded.

The base (5) allows the microscope body (3) to be freely moved in the direction of the optical axis (2a) of the objective lens (2) using a potentiomotor (18).
), the sensor (19) measures the distance between the coal polishing surface (8a) and the objective lens (2) and transmits the measured distance to the computer (13), and the potentiomotor operates based on instructions from the computer (13). (18), sensor (1
A focus controller (2o) that automatically operates so that the measurement distance according to 9) is kept constant is provided, and is configured to prevent focus shift due to movement of the stage (4).

To form the sensor (19), as shown in FIG. Or, the coal polishing surface (8
A measuring means attached to the objective lens (2) in a state biased toward the a) side, and measuring the moving distance of the probe with respect to the objective lens as the distance between the objective lens (2) and the coal polishing surface (8a) changes. 19b), the information from the measuring means (19b) is appropriately processed by the information processing means (19C) and sent to the computer (13), and the oil film (11
This is so that the distance between the objective lens (2) and the coal polished surface (8a) can be accurately measured without being adversely affected by ().

[Another example]

Next, another embodiment will be described.

In order to keep the measurement distance between the coal polishing surface (8a) and the objective lens (2) constant, a means for automatically moving the stage (4) in the direction of the optical axis (2a) of the objective lens (2) is used. The means for automatically moving the objective lens (2) or the stage (4) may be an automatic focusing means (13), (
18), (20).

It is desirable that the portion of the probe (19a) that comes into contact with the coal polished surface (8a) be formed into a pearl made of synthetic resin, glass, steel, etc. so as not to damage the coal polished surface (8a).

As the measuring means (19b), a differential transformer type, a strain gauge, or other suitable means can be used.

[Brief explanation of the drawing]

The drawings show an embodiment of the present invention, and FIG. 1 is a conceptual diagram of the main part, and FIG. 2 is a conceptual diagram of the entirety. (2)...Objective lens, (2a)...
Optical axis, (4)... Stage, (8a) Old...
Coal polished surface, (11)...oil film, (13),
(18), (20)...Automatic focus adjustment means, (19)...Sensor, (19a) River...
- Measuring head, (19b)...Measuring means.

Claims (1)

[Claims] Based on the sensor (19) that measures the distance between the coal polishing surface (8a) covered with the oil film (11) on the stage (4) and the objective lens (2), and the information from the sensor (19). The objective lens (2
0) or an automatic focusing means (13), (18), (20) for automatically moving the stage (4), in which the sensor (19) is arranged so that the coal-polished surface (8a) The measuring element (19a) in contact with the objective lens (2) is movable in the direction of the optical axis (2a) of the objective lens (2) and is urged toward the coal polishing surface (8a). The oil immersion microscope for coal is provided with a measuring means (19b) for measuring the moving distance of the measuring element (19a) with respect to the objective lens (2).