Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Aloka Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aloka Co LtdfiledCriticalAloka Co Ltd
Priority to JP2063380ApriorityCriticalpatent/JPS56119235A/ja
Publication of JPS56119235ApublicationCriticalpatent/JPS56119235A/ja
Publication of JPS624977B2publicationCriticalpatent/JPS624977B2/ja
