JPS624931U - - Google Patents

Info

Publication number
JPS624931U
JPS624931U JP9468485U JP9468485U JPS624931U JP S624931 U JPS624931 U JP S624931U JP 9468485 U JP9468485 U JP 9468485U JP 9468485 U JP9468485 U JP 9468485U JP S624931 U JPS624931 U JP S624931U
Authority
JP
Japan
Prior art keywords
chamber
transfer
processing
spiral
processing chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9468485U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0538595Y2 (US06373033-20020416-M00002.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985094684U priority Critical patent/JPH0538595Y2/ja
Publication of JPS624931U publication Critical patent/JPS624931U/ja
Application granted granted Critical
Publication of JPH0538595Y2 publication Critical patent/JPH0538595Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Threshing Machine Elements (AREA)
JP1985094684U 1985-06-23 1985-06-23 Expired - Lifetime JPH0538595Y2 (US06373033-20020416-M00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985094684U JPH0538595Y2 (US06373033-20020416-M00002.png) 1985-06-23 1985-06-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985094684U JPH0538595Y2 (US06373033-20020416-M00002.png) 1985-06-23 1985-06-23

Publications (2)

Publication Number Publication Date
JPS624931U true JPS624931U (US06373033-20020416-M00002.png) 1987-01-13
JPH0538595Y2 JPH0538595Y2 (US06373033-20020416-M00002.png) 1993-09-29

Family

ID=30958389

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985094684U Expired - Lifetime JPH0538595Y2 (US06373033-20020416-M00002.png) 1985-06-23 1985-06-23

Country Status (1)

Country Link
JP (1) JPH0538595Y2 (US06373033-20020416-M00002.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5735232U (US06373033-20020416-M00002.png) * 1980-08-02 1982-02-24
JPS57141751U (US06373033-20020416-M00002.png) * 1981-02-27 1982-09-06

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5735232U (US06373033-20020416-M00002.png) * 1980-08-02 1982-02-24
JPS57141751U (US06373033-20020416-M00002.png) * 1981-02-27 1982-09-06

Also Published As

Publication number Publication date
JPH0538595Y2 (US06373033-20020416-M00002.png) 1993-09-29

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