JPS6247783U - - Google Patents
Info
- Publication number
- JPS6247783U JPS6247783U JP13859285U JP13859285U JPS6247783U JP S6247783 U JPS6247783 U JP S6247783U JP 13859285 U JP13859285 U JP 13859285U JP 13859285 U JP13859285 U JP 13859285U JP S6247783 U JPS6247783 U JP S6247783U
- Authority
- JP
- Japan
- Prior art keywords
- cryopump
- pump case
- head
- ultra
- panels
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003014 reinforcing effect Effects 0.000 claims description 3
- 230000008014 freezing Effects 0.000 claims 1
- 238000007710 freezing Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000003463 adsorbent Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13859285U JPH0113821Y2 (https=) | 1985-09-10 | 1985-09-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13859285U JPH0113821Y2 (https=) | 1985-09-10 | 1985-09-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6247783U true JPS6247783U (https=) | 1987-03-24 |
| JPH0113821Y2 JPH0113821Y2 (https=) | 1989-04-24 |
Family
ID=31043720
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13859285U Expired JPH0113821Y2 (https=) | 1985-09-10 | 1985-09-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0113821Y2 (https=) |
-
1985
- 1985-09-10 JP JP13859285U patent/JPH0113821Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0113821Y2 (https=) | 1989-04-24 |
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