JPS6247131U - - Google Patents
Info
- Publication number
- JPS6247131U JPS6247131U JP13960385U JP13960385U JPS6247131U JP S6247131 U JPS6247131 U JP S6247131U JP 13960385 U JP13960385 U JP 13960385U JP 13960385 U JP13960385 U JP 13960385U JP S6247131 U JPS6247131 U JP S6247131U
- Authority
- JP
- Japan
- Prior art keywords
- rope
- transfer device
- wafer
- heater
- wafer transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Belt Conveyors (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13960385U JPS6247131U (enExample) | 1985-09-12 | 1985-09-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13960385U JPS6247131U (enExample) | 1985-09-12 | 1985-09-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6247131U true JPS6247131U (enExample) | 1987-03-23 |
Family
ID=31045663
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13960385U Pending JPS6247131U (enExample) | 1985-09-12 | 1985-09-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6247131U (enExample) |
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1985
- 1985-09-12 JP JP13960385U patent/JPS6247131U/ja active Pending