JPS6247131U - - Google Patents

Info

Publication number
JPS6247131U
JPS6247131U JP13960385U JP13960385U JPS6247131U JP S6247131 U JPS6247131 U JP S6247131U JP 13960385 U JP13960385 U JP 13960385U JP 13960385 U JP13960385 U JP 13960385U JP S6247131 U JPS6247131 U JP S6247131U
Authority
JP
Japan
Prior art keywords
rope
transfer device
wafer
heater
wafer transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13960385U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13960385U priority Critical patent/JPS6247131U/ja
Publication of JPS6247131U publication Critical patent/JPS6247131U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Belt Conveyors (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
JP13960385U 1985-09-12 1985-09-12 Pending JPS6247131U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13960385U JPS6247131U (enrdf_load_stackoverflow) 1985-09-12 1985-09-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13960385U JPS6247131U (enrdf_load_stackoverflow) 1985-09-12 1985-09-12

Publications (1)

Publication Number Publication Date
JPS6247131U true JPS6247131U (enrdf_load_stackoverflow) 1987-03-23

Family

ID=31045663

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13960385U Pending JPS6247131U (enrdf_load_stackoverflow) 1985-09-12 1985-09-12

Country Status (1)

Country Link
JP (1) JPS6247131U (enrdf_load_stackoverflow)

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