JPS6247124U - - Google Patents
Info
- Publication number
- JPS6247124U JPS6247124U JP1985138489U JP13848985U JPS6247124U JP S6247124 U JPS6247124 U JP S6247124U JP 1985138489 U JP1985138489 U JP 1985138489U JP 13848985 U JP13848985 U JP 13848985U JP S6247124 U JPS6247124 U JP S6247124U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- thermocouple
- back surface
- spring
- urged
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985138489U JPS6247124U (enExample) | 1985-09-10 | 1985-09-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985138489U JPS6247124U (enExample) | 1985-09-10 | 1985-09-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6247124U true JPS6247124U (enExample) | 1987-03-23 |
Family
ID=31043518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985138489U Pending JPS6247124U (enExample) | 1985-09-10 | 1985-09-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6247124U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8191792B2 (en) | 2006-07-06 | 2012-06-05 | Komatsu Ltd. | Temperature sensor, temperature control device, temperature controller and temperature-control method |
| JP2012181870A (ja) * | 2006-07-06 | 2012-09-20 | Komatsu Ltd | 温度制御装置および温度制御方法 |
-
1985
- 1985-09-10 JP JP1985138489U patent/JPS6247124U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8191792B2 (en) | 2006-07-06 | 2012-06-05 | Komatsu Ltd. | Temperature sensor, temperature control device, temperature controller and temperature-control method |
| JP2012181870A (ja) * | 2006-07-06 | 2012-09-20 | Komatsu Ltd | 温度制御装置および温度制御方法 |