JPS6246425A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPS6246425A JPS6246425A JP18567885A JP18567885A JPS6246425A JP S6246425 A JPS6246425 A JP S6246425A JP 18567885 A JP18567885 A JP 18567885A JP 18567885 A JP18567885 A JP 18567885A JP S6246425 A JPS6246425 A JP S6246425A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- alloy
- magnetic
- magnetic recording
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Lubricants (AREA)
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
及呈上勿1分互
本発明は磁気記録媒体に関し、特に磁気記録媒体の記録
の保護、即ち磁気ディスク、磁気ドラム等に保護膜を設
けることに関する。DETAILED DESCRIPTION OF THE INVENTION AND SUMMARY OF THE INVENTION The present invention relates to magnetic recording media, and more particularly to protecting recordings on magnetic recording media, that is, providing a protective film on magnetic disks, magnetic drums, and the like.
の び 日が解 しようとする− 声磁気ディスク
装置、磁気ドラム装置における磁気記録媒体は磁気ヘッ
ドとの機械的接触に対する耐摩耗性或いは耐候性、耐食
性の点で問題があり。The magnetic recording media used in magnetic disk drives and magnetic drum drives have problems in terms of resistance to wear, weather resistance, and corrosion resistance against mechanical contact with magnetic heads.
そのため通常これらの磁気記録媒体には保護膜が施され
る。そして、この保護膜は、皮膜の平滑性、均一性、耐
摩耗性、耐食性等が要求されるほかに。Therefore, these magnetic recording media are usually provided with a protective film. This protective film is required to have smoothness, uniformity, abrasion resistance, corrosion resistance, etc.
その厚さが薄いこと、即ち薄膜であることが必要である
。It is necessary that the thickness thereof is small, that is, it is a thin film.
従来、磁気ディスク、磁気ドラム等の磁気記録媒体の保
護膜として、無機保護層、或いはさらにその上に固体潤
滑剤等の潤滑層(保護層)を設けることが知られており
、該無機保護層として、ロジウム(Rh)、クローム(
Cr)(特公昭52−18001号公報)、ニッケルー
リン(Ni−P)(特公昭54−33726号公報)、
その他レニウム(Re)、オスミウム(○s)、ルテニ
ウム(Ru)、銀(Ag)、金(Au) 、 i$f
(Cu)、白金(Pt)、パラジウム(Pd)、(特公
昭57−6177号公報)、゛及びニッケルークロム(
Ni−Cr)(特公昭57−17292号公報)等が用
いられ、又、固体潤滑剤としては無機、有機の潤滑剤、
例えば硅素化合物、例えば二酸化シリコン(SiO2)
、酸化シリコン(S i O)、窒化シリコン(S i
4Ns )等(特公昭54−33726号公報)、ポ
リ硅酸もしくはシランカップリング剤、例えばテトラヒ
ドロキシシラン、ポリアミノシラン等(特公昭59−3
9809号公報)及びカーボン等が使用されている。Conventionally, it has been known to provide an inorganic protective layer or a lubricating layer (protective layer) such as a solid lubricant on top of the inorganic protective layer as a protective film for magnetic recording media such as magnetic disks and magnetic drums. As, rhodium (Rh), chromium (
Cr) (Japanese Patent Publication No. 52-18001), nickel-phosphorus (Ni-P) (Japanese Patent Publication No. 54-33726),
Other rhenium (Re), osmium (○s), ruthenium (Ru), silver (Ag), gold (Au), i$f
(Cu), platinum (Pt), palladium (Pd), (Japanese Patent Publication No. 57-6177), and nickel-chromium (
Ni-Cr) (Japanese Patent Publication No. 57-17292), etc. are used, and as solid lubricants, inorganic and organic lubricants,
For example, silicon compounds, such as silicon dioxide (SiO2)
, silicon oxide (S i O), silicon nitride (S i
4Ns) etc. (Japanese Patent Publication No. 54-33726), polysilicic acid or silane coupling agents such as tetrahydroxysilane, polyaminosilane, etc. (Japanese Patent Publication No. 59-3
9809) and carbon.
しかしながら、これらの従来の保護膜特に無機保護層に
使用される金属或いは合金はいまだその磁気記録媒体の
耐摩耗性及び耐候性或いは耐食性を充分に改善するもの
とは言えず、さらにすぐれた保護膜の出現が強く望まれ
ていた。However, the metals or alloys used in these conventional protective films, especially inorganic protective layers, cannot be said to sufficiently improve the abrasion resistance, weather resistance, or corrosion resistance of magnetic recording media, and even better protective films are not yet available. The appearance of this was strongly desired.
ユ 1、を するための手
本発明者等は前記の点を改善すべく鋭意研究の結果、磁
気記録媒体、特にハードディスク型磁気記録媒体におい
て、磁気記録層の保護膜の無機保護層として特定の合金
からなる保護層を採用することにより上記の問題点が解
決できることを見出し、本発明に到達したものである。As a result of intensive research to improve the above points, the inventors of the present invention have developed a specific inorganic protective layer for the protective film of the magnetic recording layer in magnetic recording media, especially hard disk type magnetic recording media. The inventors have discovered that the above problems can be solved by employing a protective layer made of an alloy, and have arrived at the present invention.
即ち1本発明は非磁性基体に金属薄膜磁性層。Namely, one aspect of the present invention is a metal thin film magnetic layer on a nonmagnetic substrate.
該磁性層上に無機保護層及び固体潤滑層を順次設けてな
る磁気記録媒体において、該無機保護層がNi−Mo−
Fe合金からなるものであることを特徴とする磁気記録
媒体に関する。In a magnetic recording medium in which an inorganic protective layer and a solid lubricant layer are sequentially provided on the magnetic layer, the inorganic protective layer is made of Ni-Mo-
The present invention relates to a magnetic recording medium characterized in that it is made of an Fe alloy.
本発明で用いるNi−Mo−Fe合金はその組成がMo
:25〜35重量%、Fe:3〜10重量%及びNi:
残部のものが好ましい。前記の組成範囲のものでは耐食
性および耐摩耗性の点で満足のいくものが得られる。The Ni-Mo-Fe alloy used in the present invention has a composition of Mo
: 25-35% by weight, Fe: 3-10% by weight, and Ni:
The remaining ones are preferred. With the above composition range, satisfactory corrosion resistance and wear resistance can be obtained.
これらのNi−Mo−Fe合金の保護層は非磁性基体に
形成された金属薄膜磁性層上にスパッタリング、真空蒸
着、イオンブレーティング、メッキ等の付着法により形
成される。These Ni--Mo--Fe alloy protective layers are formed on a metal thin film magnetic layer formed on a nonmagnetic substrate by an adhesion method such as sputtering, vacuum evaporation, ion blasting, or plating.
本発明で使用される非磁性基体は例えば、アルミニウム
、アルミニウム合金等の金属、ガラス、セラミックス、
エンジニアリングプラスチックス等が使用されるが、通
常はアルミニウム或いはアルミニウム合金が、主として
価格、安定供給性の面から使用される。Examples of the nonmagnetic substrate used in the present invention include metals such as aluminum and aluminum alloys, glass, ceramics,
Although engineering plastics and the like are used, aluminum or aluminum alloy is usually used mainly from the viewpoint of cost and stable supply.
アルミニウム或いはアルミニウム合金基体の表面に陽極
酸化被膜或いはニッケルリンメッキ膜等の薄膜を設ける
事により機械的剛性、硬度、加工性を上げる事もできる
。Mechanical rigidity, hardness, and workability can also be improved by providing a thin film such as an anodized film or a nickel-phosphorus plating film on the surface of the aluminum or aluminum alloy substrate.
また金属クロム層を非磁性基体表面層として設けること
により、記録特性の信頼性の向上を図ることもできる。Further, by providing a metal chromium layer as a surface layer of the nonmagnetic substrate, reliability of recording characteristics can be improved.
本発明の金属薄膜磁性層で用いられる磁性金属あるいは
合金としては、鉄、コバルト、ニッケルその他の強磁性
金属あるいはFe−Co、Fe−Ni、Co−Ni、C
o−Cr、Fe−Rh、Fe−Cu、 Fe−Au、
Co−Cu、 Co−Au。The magnetic metal or alloy used in the metal thin film magnetic layer of the present invention includes iron, cobalt, nickel and other ferromagnetic metals, Fe-Co, Fe-Ni, Co-Ni, C
o-Cr, Fe-Rh, Fe-Cu, Fe-Au,
Co-Cu, Co-Au.
Co −Y、 Go−La、 Co−Pr、 C
o−Gd、Go−8m、 Co−Pt、 Ni−C
u、 Fe−Co−Nd、Mn−B t、Mn−3
b、Mn−Alのような磁性合金を挙げることができる
。Co-Y, Go-La, Co-Pr, C
o-Gd, Go-8m, Co-Pt, Ni-C
u, Fe-Co-Nd, Mn-B t, Mn-3
b, magnetic alloys such as Mn-Al.
これらのうち、 Co −N i合金が好ましく、特に
その成分比はCo:N1=1 : 1〜9: 1である
ものが好適である。この範囲をはずれると記録特性が低
下する。Co −N i合金にCrを添加することによ
り、更に優れた特性が得られる。Crの添加量はCo+
Ntの0.1〜25%が好ましい。0.1%以下では効
果が明確でなく、25%以上では記録特性が低下する。Among these, a Co-Ni alloy is preferred, and one in which the component ratio is Co:N1=1:1 to 9:1 is particularly preferred. Outside this range, recording characteristics deteriorate. Even better properties can be obtained by adding Cr to the Co-Ni alloy. The amount of Cr added is Co+
0.1 to 25% of Nt is preferable. If it is less than 0.1%, the effect is not clear, and if it is more than 25%, the recording characteristics deteriorate.
また、Co −Cr合金も好ましく、特にその成分比は
Co : Cr=7 : 3〜9 : 1であるものが
好適である。この範囲をはずれると記録特性が低下する
。Further, a Co--Cr alloy is also preferable, and in particular, one having a component ratio of Co:Cr=7:3 to 9:1 is preferable. Outside this range, recording characteristics deteriorate.
磁性金属薄膜は非磁性基体、即ちアルミ板、ステンレス
板等の金属板、ガラス板のような無機質の板等の公知の
基材の上に直接あるいは非磁性薄膜層を介して、上記金
属又は合金を真空蒸着、スパッタリング、イオンブレー
ティング、メッキその他の方法で形成され得る。The magnetic metal thin film is coated directly or through a nonmagnetic thin film layer on a known substrate such as a metal plate such as an aluminum plate or a stainless steel plate or an inorganic plate such as a glass plate. may be formed by vacuum deposition, sputtering, ion blating, plating, or other methods.
又、無機保護層の上に設ける固体潤滑層には、従来公知
の無機の潤滑剤が用いられ、例えば二酸化シリコン、酸
化シリコン、窒化シリコン等の硅素化合物、カーボン、
M o 82等が挙げられる。In addition, for the solid lubricant layer provided on the inorganic protective layer, conventionally known inorganic lubricants are used, such as silicon compounds such as silicon dioxide, silicon oxide, and silicon nitride, carbon,
Examples include M o 82.
これらのうち、カーボンが好ましい。Among these, carbon is preferred.
潤滑層は真空蒸着、イオンブレーティング、メッキ、ス
パッタリング法等の付着法あるいはスピンコード等によ
り設けることができる。The lubricating layer can be provided by an adhesion method such as vacuum evaporation, ion blating, plating, or sputtering, or by a spin cord or the like.
走1
ハードディスク型磁気記録媒体の金属薄膜磁性層の無機
保護層としてNi−Mo−Fe合金からなる保護膜とす
ることにより、特にその組成比がMO=25〜35重量
%、Fe:3〜to重量%、及びNi:残部からなる合
金を用いて保護膜とすることにより、磁気記録媒体の機
械的剛性、耐摩耗性及び耐候性或いは耐食性を格段に上
げることができる。Run 1 By using a protective film made of Ni-Mo-Fe alloy as the inorganic protective layer of the metal thin film magnetic layer of the hard disk type magnetic recording medium, in particular, the composition ratio is MO = 25 to 35% by weight, Fe: 3 to By using an alloy consisting of % by weight and the balance of Ni as a protective film, the mechanical rigidity, abrasion resistance, and weather resistance or corrosion resistance of the magnetic recording medium can be significantly improved.
ス」L医
実施例にて本発明をさらに詳細に説明するが、本発明は
これらに限定されるものでないことは言うまでもない。The present invention will be explained in more detail with reference to Examples of S-L Doctors, but it goes without saying that the present invention is not limited thereto.
去】11に二[
円板状アルミニウム合金に非磁性金属層として金属クロ
ム層を付着させ、非磁性基体とした後、第1表に示す組
成の磁性層を高周波スパッタリング法にて設け、さらに
、この磁性層上に、同じく高周波スパッタリング法にて
第1表に示す組成の保護層100Aを設けた。さらに、
この無機保護層の表面に高周波スパッタリング法↓こよ
りカーボン潤滑層100Aを設けた。11-2 [ After a metallic chromium layer was attached as a non-magnetic metal layer to a disc-shaped aluminum alloy to form a non-magnetic substrate, a magnetic layer having the composition shown in Table 1 was provided by high-frequency sputtering method, and further, A protective layer 100A having the composition shown in Table 1 was provided on this magnetic layer by the same high frequency sputtering method. moreover,
A carbon lubricant layer 100A was provided on the surface of this inorganic protective layer by high frequency sputtering.
比 ABおよびD
円板状アルミニウム合金に非磁性金属層として金属クロ
ム層を付着させ非磁性基体とした後、第1表に示す組成
の磁性層を高周波スパッタリング法にて設け、さらに、
この磁性層上に、同じく。Ratios AB and D A metal chromium layer was attached as a non-magnetic metal layer to a disc-shaped aluminum alloy to form a non-magnetic substrate, and then a magnetic layer having the composition shown in Table 1 was provided by high-frequency sputtering, and further,
Also on this magnetic layer.
高周波スパッタリング法にて第1表に示す組成の無機保
護層100Aを設けた。さらに、この無機保護層の表面
に高周波スパッタリング法により、カーボン潤滑層10
0八を設けた。An inorganic protective layer 100A having the composition shown in Table 1 was provided by high frequency sputtering. Furthermore, a carbon lubricant layer 10 is applied to the surface of this inorganic protective layer by high frequency sputtering.
08 was established.
崖笠五二
円板状アルミニウム合金に非磁性金属層として金属クロ
ム層を付着させ非磁性基体とした後、第1表に示す組成
の磁性層を高周波スパッタリング法にて設けた。A metal chromium layer was attached as a nonmagnetic metal layer to a disk-shaped aluminum alloy to form a nonmagnetic substrate, and then a magnetic layer having the composition shown in Table 1 was provided by high frequency sputtering.
この磁性層表面に高周波スパッタリング法により、カー
ボン潤滑層200Aを設けた。A carbon lubricant layer 200A was provided on the surface of this magnetic layer by high frequency sputtering.
実施例1〜8において作成した試料および比較例A−D
において作成した試料について、耐候性テストを行なっ
た結果を第1表に示す。耐候性テストの結果は、試料の
作成直後および60℃、90%RHの環境に2ケ月間放
置した後の、ディスク記録回当たりのエラー数の増加率
(倍)で表示した。即ち、エラー数の増加率が低いほど
(1゜0に近いほど)ディスクの耐候性が優れているこ
とを意味する。Samples created in Examples 1 to 8 and Comparative Examples A to D
Table 1 shows the results of a weather resistance test performed on the samples prepared in . The results of the weather resistance test were expressed as the rate of increase (fold) in the number of errors per disk recording immediately after the sample was prepared and after it was left in an environment of 60° C. and 90% RH for two months. That is, the lower the increase rate of the number of errors (the closer it is to 1°0), the better the weather resistance of the disk is.
ここでエラー数の増加率(倍)は
エラー数の増加率(倍)
=(60℃、90%RHの環境に2ケ月間放置した後の
エラー数)/(試料作成直後のエラー数)の式で表わさ
れる。Here, the rate of increase in the number of errors (times) is the rate of increase in the number of errors (times) = (number of errors after being left in an environment of 60°C and 90% RH for 2 months) / (number of errors immediately after sample preparation). It is expressed by the formula.
なお、ディズク記録回当たりのエラー数はサーテイファ
イヤ−にて測定し、スライス・レベルの設定条件はミッ
シングが55%、エクストラが35%として行った。The number of errors per disc recording was measured using a certifier, and the slice level was set to 55% for missing and 35% for extra.
第1表において明らかな様に1本発明の無機保護膜を用
いることにより、耐候性のすぐれた薄膜型磁気記録媒体
を得ることができる。As is clear from Table 1, by using the inorganic protective film of the present invention, a thin film magnetic recording medium with excellent weather resistance can be obtained.
、北JJ口弧果
以上の実施例から明らかなように1本発明の無機保護層
の採用および磁性層の無機潤滑層との組合せにより、実
用に耐え得る薄膜型磁気記録媒体を得ることが出来る。As is clear from the above examples, by employing the inorganic protective layer of the present invention and combining it with the inorganic lubricating layer of the magnetic layer, a thin film magnetic recording medium that can withstand practical use can be obtained. .
第1図は本発明による磁気記録媒体の断面図である。
第1図において、1は非磁性基体、2は非磁性金属層、
3は薄膜型磁性層、4は無機保護層、5は固体潤滑層で
ある。FIG. 1 is a cross-sectional view of a magnetic recording medium according to the present invention. In FIG. 1, 1 is a non-magnetic substrate, 2 is a non-magnetic metal layer,
3 is a thin film type magnetic layer, 4 is an inorganic protective layer, and 5 is a solid lubricant layer.
Claims (5)
保護層及び固体潤滑層を順次設けてなる磁気記録媒体に
おいて、該無機保護層がNi−Mo−Fe合金からなる
ものであることを特徴とする磁気記録媒体。(1) A magnetic recording medium comprising a metal thin film magnetic layer on a nonmagnetic substrate, and an inorganic protective layer and a solid lubricant layer sequentially provided on the magnetic layer, in which the inorganic protective layer is made of a Ni-Mo-Fe alloy. A magnetic recording medium characterized by:
、Fe:3〜10重量%、Ni:残部からなる特許請求
の範囲第1項記載の磁気記録媒体。(2) Ni-Mo-Fe alloy contains Mo: 25 to 35% by weight
, Fe: 3 to 10% by weight, and Ni: the balance.
金の薄膜であり、その成分比がCo:Ni=1:1〜9
:1である特許請求の範囲第1項又は第2項記載の磁気
記録媒体。(3) The metal thin film magnetic layer is a thin film of an alloy whose main components are Co and Ni, and the component ratio is Co:Ni=1:1 to 9.
The magnetic recording medium according to claim 1 or 2, which is:
金の薄膜であり、その成分比が、Co:Cr=7:3〜
9:1である特許請求の範囲第1項又は第2項記載の磁
気記録媒体。(4) The metal thin film magnetic layer is a thin film of an alloy whose main components are Co and Cr, and the component ratio is Co:Cr=7:3~
9:1. The magnetic recording medium according to claim 1 or 2, wherein the ratio is 9:1.
1項、第2項、第3項又は第4項記載の磁気記録媒体。(5) The magnetic recording medium according to claim 1, 2, 3, or 4, wherein the solid lubricant layer is a carbon film.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18567885A JPS6246425A (en) | 1985-08-26 | 1985-08-26 | Magnetic recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18567885A JPS6246425A (en) | 1985-08-26 | 1985-08-26 | Magnetic recording medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6246425A true JPS6246425A (en) | 1987-02-28 |
Family
ID=16174950
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18567885A Pending JPS6246425A (en) | 1985-08-26 | 1985-08-26 | Magnetic recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6246425A (en) |
-
1985
- 1985-08-26 JP JP18567885A patent/JPS6246425A/en active Pending
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