JPS6246344U - - Google Patents
Info
- Publication number
- JPS6246344U JPS6246344U JP12144085U JP12144085U JPS6246344U JP S6246344 U JPS6246344 U JP S6246344U JP 12144085 U JP12144085 U JP 12144085U JP 12144085 U JP12144085 U JP 12144085U JP S6246344 U JPS6246344 U JP S6246344U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- pressure
- measurement
- measuring
- converting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12144085U JPS6246344U (is) | 1985-08-07 | 1985-08-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12144085U JPS6246344U (is) | 1985-08-07 | 1985-08-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6246344U true JPS6246344U (is) | 1987-03-20 |
Family
ID=31010714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12144085U Pending JPS6246344U (is) | 1985-08-07 | 1985-08-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6246344U (is) |
-
1985
- 1985-08-07 JP JP12144085U patent/JPS6246344U/ja active Pending