JPS6245829U - - Google Patents
Info
- Publication number
- JPS6245829U JPS6245829U JP1985136712U JP13671285U JPS6245829U JP S6245829 U JPS6245829 U JP S6245829U JP 1985136712 U JP1985136712 U JP 1985136712U JP 13671285 U JP13671285 U JP 13671285U JP S6245829 U JPS6245829 U JP S6245829U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- chuck table
- photo sensor
- clutch
- drive source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- 235000012431 wafers Nutrition 0.000 claims 7
- 230000005540 biological transmission Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985136712U JPH056662Y2 (enrdf_load_stackoverflow) | 1985-09-06 | 1985-09-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985136712U JPH056662Y2 (enrdf_load_stackoverflow) | 1985-09-06 | 1985-09-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6245829U true JPS6245829U (enrdf_load_stackoverflow) | 1987-03-19 |
| JPH056662Y2 JPH056662Y2 (enrdf_load_stackoverflow) | 1993-02-19 |
Family
ID=31040082
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985136712U Expired - Lifetime JPH056662Y2 (enrdf_load_stackoverflow) | 1985-09-06 | 1985-09-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH056662Y2 (enrdf_load_stackoverflow) |
-
1985
- 1985-09-06 JP JP1985136712U patent/JPH056662Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH056662Y2 (enrdf_load_stackoverflow) | 1993-02-19 |
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