JPS6245827U - - Google Patents
Info
- Publication number
- JPS6245827U JPS6245827U JP13641385U JP13641385U JPS6245827U JP S6245827 U JPS6245827 U JP S6245827U JP 13641385 U JP13641385 U JP 13641385U JP 13641385 U JP13641385 U JP 13641385U JP S6245827 U JPS6245827 U JP S6245827U
- Authority
- JP
- Japan
- Prior art keywords
- quartz glass
- jig
- utility
- cylindrical body
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13641385U JPS6245827U (cs) | 1985-09-06 | 1985-09-06 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13641385U JPS6245827U (cs) | 1985-09-06 | 1985-09-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6245827U true JPS6245827U (cs) | 1987-03-19 |
Family
ID=31039500
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13641385U Pending JPS6245827U (cs) | 1985-09-06 | 1985-09-06 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6245827U (cs) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011151252A (ja) * | 2010-01-22 | 2011-08-04 | Tdk Corp | 電子部品 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5623741A (en) * | 1979-08-06 | 1981-03-06 | Toshiba Ceramics Co Ltd | Quartz glass furnace core tube for manufacturing semiconductor |
-
1985
- 1985-09-06 JP JP13641385U patent/JPS6245827U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5623741A (en) * | 1979-08-06 | 1981-03-06 | Toshiba Ceramics Co Ltd | Quartz glass furnace core tube for manufacturing semiconductor |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011151252A (ja) * | 2010-01-22 | 2011-08-04 | Tdk Corp | 電子部品 |