JPS6244109U - - Google Patents

Info

Publication number
JPS6244109U
JPS6244109U JP13510085U JP13510085U JPS6244109U JP S6244109 U JPS6244109 U JP S6244109U JP 13510085 U JP13510085 U JP 13510085U JP 13510085 U JP13510085 U JP 13510085U JP S6244109 U JPS6244109 U JP S6244109U
Authority
JP
Japan
Prior art keywords
diaphragm
drive shaft
chamber
spring
sectional
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13510085U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0328161Y2 (US20030220297A1-20031127-C00033.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13510085U priority Critical patent/JPH0328161Y2/ja
Publication of JPS6244109U publication Critical patent/JPS6244109U/ja
Application granted granted Critical
Publication of JPH0328161Y2 publication Critical patent/JPH0328161Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Actuator (AREA)
JP13510085U 1985-09-05 1985-09-05 Expired JPH0328161Y2 (US20030220297A1-20031127-C00033.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13510085U JPH0328161Y2 (US20030220297A1-20031127-C00033.png) 1985-09-05 1985-09-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13510085U JPH0328161Y2 (US20030220297A1-20031127-C00033.png) 1985-09-05 1985-09-05

Publications (2)

Publication Number Publication Date
JPS6244109U true JPS6244109U (US20030220297A1-20031127-C00033.png) 1987-03-17
JPH0328161Y2 JPH0328161Y2 (US20030220297A1-20031127-C00033.png) 1991-06-18

Family

ID=31036966

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13510085U Expired JPH0328161Y2 (US20030220297A1-20031127-C00033.png) 1985-09-05 1985-09-05

Country Status (1)

Country Link
JP (1) JPH0328161Y2 (US20030220297A1-20031127-C00033.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20240057361A (ko) 2022-10-24 2024-05-02 신에쓰 가가꾸 고교 가부시끼가이샤 레지스트 재료 및 패턴 형성 방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20240057361A (ko) 2022-10-24 2024-05-02 신에쓰 가가꾸 고교 가부시끼가이샤 레지스트 재료 및 패턴 형성 방법

Also Published As

Publication number Publication date
JPH0328161Y2 (US20030220297A1-20031127-C00033.png) 1991-06-18

Similar Documents

Publication Publication Date Title
JPS60116562A (ja) サーボ装置用流体分配装置
JPH01116236U (US20030220297A1-20031127-C00033.png)
JPS6244109U (US20030220297A1-20031127-C00033.png)
JPH0214876U (US20030220297A1-20031127-C00033.png)
JPS6185574U (US20030220297A1-20031127-C00033.png)
JPS61106915U (US20030220297A1-20031127-C00033.png)
JPH033098Y2 (US20030220297A1-20031127-C00033.png)
JPS61163728U (US20030220297A1-20031127-C00033.png)
JPH01135509U (US20030220297A1-20031127-C00033.png)
JPS62134936U (US20030220297A1-20031127-C00033.png)
JPH02128843U (US20030220297A1-20031127-C00033.png)
JPS6211071U (US20030220297A1-20031127-C00033.png)
JPH0198965U (US20030220297A1-20031127-C00033.png)
JPS6148873U (US20030220297A1-20031127-C00033.png)
JPS61190035U (US20030220297A1-20031127-C00033.png)
JPH0417185U (US20030220297A1-20031127-C00033.png)
JPS63101302U (US20030220297A1-20031127-C00033.png)
JPH01173503U (US20030220297A1-20031127-C00033.png)
JPS6164083U (US20030220297A1-20031127-C00033.png)
JPH0475277U (US20030220297A1-20031127-C00033.png)
JPH0187372U (US20030220297A1-20031127-C00033.png)
JPS6187205U (US20030220297A1-20031127-C00033.png)
JPS62106075U (US20030220297A1-20031127-C00033.png)
JPH0285062U (US20030220297A1-20031127-C00033.png)
JPS63185971U (US20030220297A1-20031127-C00033.png)