JPS6242239U - - Google Patents
Info
- Publication number
- JPS6242239U JPS6242239U JP13313985U JP13313985U JPS6242239U JP S6242239 U JPS6242239 U JP S6242239U JP 13313985 U JP13313985 U JP 13313985U JP 13313985 U JP13313985 U JP 13313985U JP S6242239 U JPS6242239 U JP S6242239U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- rigidity
- manufacturing equipment
- central part
- semiconductor manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 4
- 239000004065 semiconductor Substances 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13313985U JPS6242239U (OSRAM) | 1985-09-02 | 1985-09-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13313985U JPS6242239U (OSRAM) | 1985-09-02 | 1985-09-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6242239U true JPS6242239U (OSRAM) | 1987-03-13 |
Family
ID=31033177
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13313985U Pending JPS6242239U (OSRAM) | 1985-09-02 | 1985-09-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6242239U (OSRAM) |
-
1985
- 1985-09-02 JP JP13313985U patent/JPS6242239U/ja active Pending