JPS6242238U - - Google Patents

Info

Publication number

JPS6242238U

JPS6242238U JP13374685U JP13374685U JPS6242238U JP S6242238 U JPS6242238 U JP S6242238U JP 13374685 U JP13374685 U JP 13374685U JP 13374685 U JP13374685 U JP 13374685U JP S6242238 U JPS6242238 U JP S6242238U

Authority

JP

Japan

Prior art keywords

chamber

annealing

heating

inert gas

gas flows

Prior art date

1985-08-31

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000000137 annealing Methods 0.000 claims description 10
• 238000010438 heat treatment Methods 0.000 claims 2
• 239000011261 inert gas Substances 0.000 claims 2
• 238000005192 partition Methods 0.000 description 1
• 239000010453 quartz Substances 0.000 description 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1

Cited By (1)