JPS6242238U - - Google Patents

Info

Publication number
JPS6242238U
JPS6242238U JP13374685U JP13374685U JPS6242238U JP S6242238 U JPS6242238 U JP S6242238U JP 13374685 U JP13374685 U JP 13374685U JP 13374685 U JP13374685 U JP 13374685U JP S6242238 U JPS6242238 U JP S6242238U
Authority
JP
Japan
Prior art keywords
chamber
annealing
heating
inert gas
gas flows
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13374685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13374685U priority Critical patent/JPS6242238U/ja
Publication of JPS6242238U publication Critical patent/JPS6242238U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Furnace Details (AREA)
JP13374685U 1985-08-31 1985-08-31 Pending JPS6242238U (US07642317-20100105-C00010.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13374685U JPS6242238U (US07642317-20100105-C00010.png) 1985-08-31 1985-08-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13374685U JPS6242238U (US07642317-20100105-C00010.png) 1985-08-31 1985-08-31

Publications (1)

Publication Number Publication Date
JPS6242238U true JPS6242238U (US07642317-20100105-C00010.png) 1987-03-13

Family

ID=31034340

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13374685U Pending JPS6242238U (US07642317-20100105-C00010.png) 1985-08-31 1985-08-31

Country Status (1)

Country Link
JP (1) JPS6242238U (US07642317-20100105-C00010.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0454399U (US07642317-20100105-C00010.png) * 1990-09-14 1992-05-11

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5636130A (en) * 1979-08-31 1981-04-09 Nec Corp Manufacturing device of semiconductor
JPS57143803A (en) * 1981-03-03 1982-09-06 Sony Corp Method of forming resisotr

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5636130A (en) * 1979-08-31 1981-04-09 Nec Corp Manufacturing device of semiconductor
JPS57143803A (en) * 1981-03-03 1982-09-06 Sony Corp Method of forming resisotr

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0454399U (US07642317-20100105-C00010.png) * 1990-09-14 1992-05-11

Similar Documents

Publication Publication Date Title
JPS6242238U (US07642317-20100105-C00010.png)
JPS6242237U (US07642317-20100105-C00010.png)
JPS6284926U (US07642317-20100105-C00010.png)
JPS63145831U (US07642317-20100105-C00010.png)
JPS6335288U (US07642317-20100105-C00010.png)
JPS6212868U (US07642317-20100105-C00010.png)
JPS6177588U (US07642317-20100105-C00010.png)
JPH0246857U (US07642317-20100105-C00010.png)
JPS6295731U (US07642317-20100105-C00010.png)
JPS633136U (US07642317-20100105-C00010.png)
JPS6451198U (US07642317-20100105-C00010.png)
JPH01120326U (US07642317-20100105-C00010.png)
JPH0189731U (US07642317-20100105-C00010.png)
JPH01168849U (US07642317-20100105-C00010.png)
JPH0160531U (US07642317-20100105-C00010.png)
JPH02140973U (US07642317-20100105-C00010.png)
JPS62101858U (US07642317-20100105-C00010.png)
JPS62198494U (US07642317-20100105-C00010.png)
JPH0438648U (US07642317-20100105-C00010.png)
JPS6111773U (ja) 拡散炉
JPS62202298U (US07642317-20100105-C00010.png)
JPS63105059U (US07642317-20100105-C00010.png)
JPH01120327U (US07642317-20100105-C00010.png)
JPS6412362U (US07642317-20100105-C00010.png)
JPH01101254U (US07642317-20100105-C00010.png)