JPS6242236U - - Google Patents

Info

Publication number
JPS6242236U
JPS6242236U JP13427685U JP13427685U JPS6242236U JP S6242236 U JPS6242236 U JP S6242236U JP 13427685 U JP13427685 U JP 13427685U JP 13427685 U JP13427685 U JP 13427685U JP S6242236 U JPS6242236 U JP S6242236U
Authority
JP
Japan
Prior art keywords
substrate
heating holder
window portion
molecular beam
substrate heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13427685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13427685U priority Critical patent/JPS6242236U/ja
Publication of JPS6242236U publication Critical patent/JPS6242236U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP13427685U 1985-09-02 1985-09-02 Pending JPS6242236U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13427685U JPS6242236U (enrdf_load_stackoverflow) 1985-09-02 1985-09-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13427685U JPS6242236U (enrdf_load_stackoverflow) 1985-09-02 1985-09-02

Publications (1)

Publication Number Publication Date
JPS6242236U true JPS6242236U (enrdf_load_stackoverflow) 1987-03-13

Family

ID=31035368

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13427685U Pending JPS6242236U (enrdf_load_stackoverflow) 1985-09-02 1985-09-02

Country Status (1)

Country Link
JP (1) JPS6242236U (enrdf_load_stackoverflow)

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