JPS6241908U - - Google Patents

Info

Publication number
JPS6241908U
JPS6241908U JP13463285U JP13463285U JPS6241908U JP S6241908 U JPS6241908 U JP S6241908U JP 13463285 U JP13463285 U JP 13463285U JP 13463285 U JP13463285 U JP 13463285U JP S6241908 U JPS6241908 U JP S6241908U
Authority
JP
Japan
Prior art keywords
cylinder
bellows
piston
chamber
rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13463285U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0523841Y2 (US06653308-20031125-C00199.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985134632U priority Critical patent/JPH0523841Y2/ja
Publication of JPS6241908U publication Critical patent/JPS6241908U/ja
Application granted granted Critical
Publication of JPH0523841Y2 publication Critical patent/JPH0523841Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Actuator (AREA)
  • Diaphragms And Bellows (AREA)
JP1985134632U 1985-09-03 1985-09-03 Expired - Lifetime JPH0523841Y2 (US06653308-20031125-C00199.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985134632U JPH0523841Y2 (US06653308-20031125-C00199.png) 1985-09-03 1985-09-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985134632U JPH0523841Y2 (US06653308-20031125-C00199.png) 1985-09-03 1985-09-03

Publications (2)

Publication Number Publication Date
JPS6241908U true JPS6241908U (US06653308-20031125-C00199.png) 1987-03-13
JPH0523841Y2 JPH0523841Y2 (US06653308-20031125-C00199.png) 1993-06-17

Family

ID=31036055

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985134632U Expired - Lifetime JPH0523841Y2 (US06653308-20031125-C00199.png) 1985-09-03 1985-09-03

Country Status (1)

Country Link
JP (1) JPH0523841Y2 (US06653308-20031125-C00199.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63312502A (ja) * 1987-06-12 1988-12-21 Okuda Yasuyuki 多重シ−ルベロ−ズによる移動機構
JPH02212608A (ja) * 1989-02-10 1990-08-23 Sumitomo Precision Prod Co Ltd 真空環境用作動筒
JPH02212609A (ja) * 1989-02-10 1990-08-23 Sumitomo Precision Prod Co Ltd 真空環境用作動筒装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5141859U (US06653308-20031125-C00199.png) * 1974-09-21 1976-03-27
JPS552248U (US06653308-20031125-C00199.png) * 1979-03-16 1980-01-09
JPS6166262U (US06653308-20031125-C00199.png) * 1984-10-05 1986-05-07

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5141859U (US06653308-20031125-C00199.png) * 1974-09-21 1976-03-27
JPS552248U (US06653308-20031125-C00199.png) * 1979-03-16 1980-01-09
JPS6166262U (US06653308-20031125-C00199.png) * 1984-10-05 1986-05-07

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63312502A (ja) * 1987-06-12 1988-12-21 Okuda Yasuyuki 多重シ−ルベロ−ズによる移動機構
JPH02212608A (ja) * 1989-02-10 1990-08-23 Sumitomo Precision Prod Co Ltd 真空環境用作動筒
JPH02212609A (ja) * 1989-02-10 1990-08-23 Sumitomo Precision Prod Co Ltd 真空環境用作動筒装置

Also Published As

Publication number Publication date
JPH0523841Y2 (US06653308-20031125-C00199.png) 1993-06-17

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