JPS6241473A - Gas passage open/shut mechanism made of fluorine contained resin - Google Patents

Abstract

PURPOSE:To achieve the enhancement of sealing degree by using fluorine contained resins of different hardness to a cylinder body and a valve body respectively so as to utilize self-lubricity being the characteristics of raw materials. CONSTITUTION:A valve chamber 2 is provided in the interior of a cylinder body 1 made of Teflon (registered trademark), and a valve body 3 made of a fluorine contained resin is inserted therein. On the intermediate circumference of the valve body 3, a ring-shaped vent groove 5 is provided, and a gas passage hole 6 is penetrated at the center of the cylinder body 1, so that both the ends of the ring-shaped vent groove are communicated with the passage hole at the center of the cylinder body. Since the valve body 3 and the recess 8 of the cylinder body 1 are made by combining fluorine contained resins of different hardness and are finished by precision working, self-lubricity can be sufficiently utilized, and smooth open/shut operation can be always achieved.

Description

DETAILED DESCRIPTION OF THE INVENTION A. Field of industrial application: The gas flow interlocking coffin of the present invention is entirely made of fluorine wood. For example, when polyacetal (commonly known as Delrin) is exposed to a rapid gas flow in a dense atmosphere like the one mentioned above, the solid solid becomes like a sea surface within a short period of time, creating an unimaginable phenomenon. A kind of affinity arises.

Moreover, corrosion becomes more severe in metals.

Therefore, even though metals and substances that may corrode cannot be used in the above-mentioned industrial fields, it is a mechanism that should not be used in the field of application where wood was invented.

Mouth: Conventional technology was developed using fluororesin on October 14, 1939.
Ij on the date! Desire 5: Launch of fluororesin vacuum bottle set No. 54502, and remain -. However, we have made further improvements to this. For the purpose of moving semiconductors (silicon wafers), it must be operated by vacuum suction and used in inspection and manufacturing processes. LQ, metal 11
) The problem that the invention aims to solve is that it focuses on the fact that fats corrode and rust spreads in the factory, causing a major hindrance and harm to the manufacturing process.Therefore, the present invention aims to solve the problems In order to eliminate the above drawbacks, the gas flow opening/closing structure was made entirely of fluororesin. ◎This fluororesin has the tremendous property of never corroding anything other than aqua regia and Kinhige sodium 5 For example, polyacetal ( When Delrin (commonly known as) is exposed to a rapid flow in the above-mentioned dense feces atmosphere, the solid solid becomes spongy within a short period of time, and a phenomenon that makes it impossible to see the phase image occurs. The corrosion is more severe. When used in a harsh site such as the upper tsuba 1, it is impossible to use cut metal and materials that are likely to corrode, and the present invention solves the above problems. In order to solve this problem, fluororesins with different hardnesses are used for each of the cylinder body 11) and the valve body 121, and by making full use of the material's characteristic lubricity, the degree of sealing is inevitably improved. , Since the leakage is slick, there is excellent separation between adsorbed and non-adsorbed materials.
In addition, a mold rod is embedded in the extruded rod of the valve body, which has good wafer attachment/detaching performance, and the outer fluororesin is bent to avoid any obstructions. In order to improve the performance, the central layer I21g of the valve body has a structure in which the temperature of the air flowing through it is deep, so that the flowing gas does not come into contact with the center metal of the spring.

Below, in Figure 1 to explain the present invention per drawing,; '4) is connected to the center of the upper surface of the valve &131, and is made of fluorine resin. The communication hole 161 is passed through the shell, and the valve body (I
A cylindrical recess (8) is provided at the lower end of the valve chamber (2), a ventilation hole (9) is provided at the center of the bottom of the valve chamber (2), and the valve is pushed into the recess (8) of (8). Spring dealer] intervened. The valve body (81 opening/closing pushbuttons, made of Teflon and vertically installed with an operating shaft on the bottom surface. 15fJ) is located in the valve chamber (2).
A plug made of Teflon resin is tightly fitted into the hollow circle at the upper end of the hole, and a guide ring (14) is provided on the upper center surface of the inner hole. Insert the (metal release ring α6) into the umbrella-shaped fitting hole provided on the outer periphery of the above Teflon resin plug (3) into which the A-axis (4) was inserted. 0 early 2 that can prevent the valve body from escaping through the
In the figure, the intake nozzle is equipped with a suction cup QB) at the tip, and there is a suction I on the suction side (2) on the bottom of this nozzle.
The tube is connected to the air nozzle provided at the rear end of the cylinder body 11 made of Teflon, and the tube is connected to the rear end of the Teflon cylinder body 11. The present invention will now be described in detail.For the purpose of moving the semiconductor silicon urchin/S-, the que/S- is moved by vacuum suction and is used in inspection and manufacturing processes. At semiconductor manufacturing sites, corrosive gases are concentrated in the air at suction points, corrode metals and resins, and spread rust throughout the factory, causing serious problems in the manufacturing process. In the present invention, a fluororesin with an increased degree of fluorine, that is, 3F (high hardness of 3F) and tetrafluoroethylene of Teflon (soft) is used. Fluororesin material is used for all air contact parts of the opening/closing mechanism to ensure that there will be no opening/closing troubles due to corrosion of the opening/closing mechanism.

In addition, (valve a) (S+ and circular cavity are combined with fluororesin of different hardness and precision machined, so the self-lubricating property characteristic of mouth resin is fully utilized, making it extremely durable and always opening and closing smoothly. In addition, when the present invention is not used, it is in a combination shape as shown in Figure 1.The valve chamber (1) is located in the center of the cylinder tree E:1).
2), in which the necessary operating mechanism is built in, press down on the 1st control in this mechanism. Then, the God strong axis f1) which is connected to the center of the valve body (8) in Insertion 1 is pushed down with the push button (B), so Rekaido m presses the valve body (8) with the spring scream. It can be pushed down through the Therefore, the annular groove (5) in the middle part around the V valve body t! - The VC is pressed down so that it matches the vent hole (6), opens at the top of the valve body, and communicates with the through hole of the cylinder body (1).

The suction at the tip and the gas flow hole (6) at the center are blocked. Lower valve chamber (2
) is contracted, and the air inside is forced out through the small hole (9) at the bottom. Therefore, while pressing the push button (), the cylinder main m: 1) is opened. Air can now be supplied from a vacuum pump through a nozzle array.

Effects of the Invention Since the present invention uses fluororesin with different hardness for the main body and the valve body, the self-lubricating property characteristic of the VF material is utilized to improve the degree of sealing. death,
In short, the wafer desorption performance is good even though the leakage is 1k (and the separation between the adsorbed object and the adsorbed object is excellent).

Furthermore, a Shino-yoshi shaft '41 made of synthetic Isi resin is provided at the center of the upper surface of the valve body, and a metal rod is embedded within this shaft.

In order to prevent damage such as breakage of the reinforced shaft of the fluororesin ship*.

In addition, the spring, which is an important mechanical part for opening and closing, is inserted into the spring insertion groove in the recess at the bottom of the cylinder, so the gas contact part is not exposed, so there is no fear of corrosion, and it has excellent durability.

In addition, a small diameter hole is provided at the bottom of the cylinder hole so that air resistance due to the vertical movement of the piston cylinder can act smoothly. Can be maintained at all times.

All other parts are assembled together so smooth opening/closing operation is always 4
1. Easy to maintain and assemble and disassemble.

Furthermore, in this dispatch, improvements were made to the part that performs the intake operation on the intake nozzle side, and a removable cap + 211 was installed on the tip of the intake nozzle cape 7) of the cylinder body 11). Attach the ventilation pipe with # (b), attach a ball valve with a ventilation hole to the end of the vomit pipe, fit this ball valve to the tip inside the cap above, and thread the suction cup 0 chain through it. It is possible to freely change direction using the trachea as a fulcrum.

Also, the inside of the cap 121) that receives the ball valve L2Sl is designed to be received by the entrance circumference vkX of the umbrella-shaped hole, so fit the ball valve -) inside the tip α■ of the cap 4). The cap can be clamped, and the tightening condition of the cap can be determined depending on the tightening condition of the ball valve.
The direction of the nozzle tip (17) and the suction cup (18) can be adjusted and fixed at an appropriate angle. Since it can be freely changed, its operational value can be greatly improved.

[Brief explanation of drawings]

Figure 1 is a partially cutaway vertical sectional view of the fluororesin gas flow opening/closing mechanism of the present invention when it is approximately doubled in size. Figure 3 is an enlarged vertical cross-sectional view of the intermediate part of the present invention, and Figures 1 to 10 are a side view of the flow opening/closing mechanism. The drawings are about twice as large as the previous one, and Figure 4 is a perspective view of the push button, Figure 5 is a front view of the release ring, Figure 6 is a plan view of Figure 5, and Figure 1 is the same as above. Figure 0-8, which is a perspective view, is a perspective view of a tear gun resin stopper (4). Figure (9) is a perspective view of the valve body, Figure 0 is a perspective view of the push spring inserted into the recess of the valve body, and Figure 11 is a perspective view of a portion of the cylinder body. The tip of the variable-shaped suction cup (
f) Partial view, Figure 13 is a large cross-sectional view of the same suction cup part; 1) - Teflon cylinder t, body; 12) - Valve chamber;
18I-valve body, 14)-reinforcement made of fluorinated toilet fat provided at the center of the upper surface of the valve body 11+, 15)-annular ventilation groove, (6)-gas flow hole, ())-center of the cylinder body''JII4 fitting Air hole, 18) - Valve body recess, (9) - Ventilation hole, - One push spring, α11 - Push button made of tear four, 4 - Sweeping shaft, a
Bell - Teflon resin plug, - 1 guide, U - umbrella-shaped fitting hole, α6) - Metal opening/closing ring, - 1 intake nozzle, 0
81-Suction cup, Lee-suction surface on the bottom of the suction cup, -1 suction nozzle, 1-removable cap, 6!21-a-t, (g)-ball valve, --inlet peripheral opening of umbrella-shaped hole

Claims (2)

[Claims] (1) The present invention provides a valve chamber (2) inside a cylinder body (1) made of Teflon (registered trademark), inserts a valve body (3) made of fluororesin into the valve chamber, and inserts a fluororesin in the center of the upper surface of the valve chamber (2). An annular ventilation groove (5) is provided around the middle of the valve body.
), and a gas flow hole (
6), both ends of which communicate with the central vent hole (7) of the cylinder body, and a recess (
8), a vent hole (9) is opened in the center of the lower part of the valve chamber (2), and a press spring (10) is inserted into the recess (8) to open the valve chamber (2). A Teflon resin plug (13
) are closely fitted, a guide ring (14) is provided on the upper center surface of the push button, and the reinforcing shaft (4) of the push button is inserted into the center of this inner hole.
Furthermore, a fitting hole (15
), push the metal release ring (16) into this,
The plug body (13) is fixed and the push spring (10) in the recess (8) is expanded and contracted via the push button of the push button shaft (12) to open and close the required air. Fluororesin gas flow opening/closing mechanism. (2) (2) A removable cap (21) is provided at the tip (17) on the intake nozzle side of the cylinder body (1), and within this cap is a ventilation pipe (22) with a suction cup (18) at the tip.
and a ball valve (23) with a vent hole at the end of the intake pipe.
This ball valve is fitted onto the inner tip of the cap (21), and the suction cup (18) is inserted through the ventilation pipe (22) to the ball valve (
23) as a fulcrum, the fluororesin gas can freely change direction while maintaining airtightness, and has a dish-shaped recess (25) at the center of the intake side of the ball valve. Flow opening/closing mechanism.