JPS6241043U - - Google Patents
Info
- Publication number
- JPS6241043U JPS6241043U JP13222385U JP13222385U JPS6241043U JP S6241043 U JPS6241043 U JP S6241043U JP 13222385 U JP13222385 U JP 13222385U JP 13222385 U JP13222385 U JP 13222385U JP S6241043 U JPS6241043 U JP S6241043U
- Authority
- JP
- Japan
- Prior art keywords
- storage chamber
- pair
- processing apparatus
- plasma processing
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002347 injection Methods 0.000 claims description 6
- 239000007924 injection Substances 0.000 claims description 6
- 229920003002 synthetic resin Polymers 0.000 claims description 2
- 239000000057 synthetic resin Substances 0.000 claims description 2
- 230000004308 accommodation Effects 0.000 description 1
Landscapes
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13222385U JPS6241043U (OSRAM) | 1985-08-28 | 1985-08-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13222385U JPS6241043U (OSRAM) | 1985-08-28 | 1985-08-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6241043U true JPS6241043U (OSRAM) | 1987-03-11 |
Family
ID=31031403
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13222385U Pending JPS6241043U (OSRAM) | 1985-08-28 | 1985-08-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6241043U (OSRAM) |
-
1985
- 1985-08-28 JP JP13222385U patent/JPS6241043U/ja active Pending