JPS6240835U - - Google Patents
Info
- Publication number
- JPS6240835U JPS6240835U JP13269885U JP13269885U JPS6240835U JP S6240835 U JPS6240835 U JP S6240835U JP 13269885 U JP13269885 U JP 13269885U JP 13269885 U JP13269885 U JP 13269885U JP S6240835 U JPS6240835 U JP S6240835U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- orientation flat
- fixing table
- sensor
- end point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Control Of Position Or Direction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13269885U JPS6240835U (de) | 1985-08-29 | 1985-08-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13269885U JPS6240835U (de) | 1985-08-29 | 1985-08-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6240835U true JPS6240835U (de) | 1987-03-11 |
Family
ID=31032330
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13269885U Pending JPS6240835U (de) | 1985-08-29 | 1985-08-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6240835U (de) |
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1985
- 1985-08-29 JP JP13269885U patent/JPS6240835U/ja active Pending