JPS6240756U - - Google Patents
Info
- Publication number
- JPS6240756U JPS6240756U JP13145285U JP13145285U JPS6240756U JP S6240756 U JPS6240756 U JP S6240756U JP 13145285 U JP13145285 U JP 13145285U JP 13145285 U JP13145285 U JP 13145285U JP S6240756 U JPS6240756 U JP S6240756U
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- plasma chamber
- plasma
- filament
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000002500 ions Chemical class 0.000 claims 3
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13145285U JPS6240756U (el) | 1985-08-30 | 1985-08-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13145285U JPS6240756U (el) | 1985-08-30 | 1985-08-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6240756U true JPS6240756U (el) | 1987-03-11 |
Family
ID=31029908
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13145285U Pending JPS6240756U (el) | 1985-08-30 | 1985-08-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6240756U (el) |
-
1985
- 1985-08-30 JP JP13145285U patent/JPS6240756U/ja active Pending