JPS6240756U - - Google Patents

Info

Publication number
JPS6240756U
JPS6240756U JP13145285U JP13145285U JPS6240756U JP S6240756 U JPS6240756 U JP S6240756U JP 13145285 U JP13145285 U JP 13145285U JP 13145285 U JP13145285 U JP 13145285U JP S6240756 U JPS6240756 U JP S6240756U
Authority
JP
Japan
Prior art keywords
ion source
plasma chamber
plasma
filament
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13145285U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13145285U priority Critical patent/JPS6240756U/ja
Publication of JPS6240756U publication Critical patent/JPS6240756U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP13145285U 1985-08-30 1985-08-30 Pending JPS6240756U (US06521211-20030218-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13145285U JPS6240756U (US06521211-20030218-C00004.png) 1985-08-30 1985-08-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13145285U JPS6240756U (US06521211-20030218-C00004.png) 1985-08-30 1985-08-30

Publications (1)

Publication Number Publication Date
JPS6240756U true JPS6240756U (US06521211-20030218-C00004.png) 1987-03-11

Family

ID=31029908

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13145285U Pending JPS6240756U (US06521211-20030218-C00004.png) 1985-08-30 1985-08-30

Country Status (1)

Country Link
JP (1) JPS6240756U (US06521211-20030218-C00004.png)

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