JPS6240585U - - Google Patents
Info
- Publication number
- JPS6240585U JPS6240585U JP12997185U JP12997185U JPS6240585U JP S6240585 U JPS6240585 U JP S6240585U JP 12997185 U JP12997185 U JP 12997185U JP 12997185 U JP12997185 U JP 12997185U JP S6240585 U JPS6240585 U JP S6240585U
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- protruding
- board
- pinion
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 2
Landscapes
- Gears, Cams (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12997185U JPH0247515Y2 (ko) | 1985-08-28 | 1985-08-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12997185U JPH0247515Y2 (ko) | 1985-08-28 | 1985-08-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6240585U true JPS6240585U (ko) | 1987-03-11 |
| JPH0247515Y2 JPH0247515Y2 (ko) | 1990-12-13 |
Family
ID=31027029
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12997185U Expired JPH0247515Y2 (ko) | 1985-08-28 | 1985-08-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0247515Y2 (ko) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7213963B2 (en) | 2003-06-09 | 2007-05-08 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| US7649611B2 (en) | 2005-12-30 | 2010-01-19 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
-
1985
- 1985-08-28 JP JP12997185U patent/JPH0247515Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0247515Y2 (ko) | 1990-12-13 |