JPS6240585U - - Google Patents

Info

Publication number
JPS6240585U
JPS6240585U JP12997185U JP12997185U JPS6240585U JP S6240585 U JPS6240585 U JP S6240585U JP 12997185 U JP12997185 U JP 12997185U JP 12997185 U JP12997185 U JP 12997185U JP S6240585 U JPS6240585 U JP S6240585U
Authority
JP
Japan
Prior art keywords
shaft
protruding
board
pinion
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12997185U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0247515Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12997185U priority Critical patent/JPH0247515Y2/ja
Publication of JPS6240585U publication Critical patent/JPS6240585U/ja
Application granted granted Critical
Publication of JPH0247515Y2 publication Critical patent/JPH0247515Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Gears, Cams (AREA)
JP12997185U 1985-08-28 1985-08-28 Expired JPH0247515Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12997185U JPH0247515Y2 (enrdf_load_stackoverflow) 1985-08-28 1985-08-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12997185U JPH0247515Y2 (enrdf_load_stackoverflow) 1985-08-28 1985-08-28

Publications (2)

Publication Number Publication Date
JPS6240585U true JPS6240585U (enrdf_load_stackoverflow) 1987-03-11
JPH0247515Y2 JPH0247515Y2 (enrdf_load_stackoverflow) 1990-12-13

Family

ID=31027029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12997185U Expired JPH0247515Y2 (enrdf_load_stackoverflow) 1985-08-28 1985-08-28

Country Status (1)

Country Link
JP (1) JPH0247515Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7213963B2 (en) 2003-06-09 2007-05-08 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7649611B2 (en) 2005-12-30 2010-01-19 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method

Also Published As

Publication number Publication date
JPH0247515Y2 (enrdf_load_stackoverflow) 1990-12-13

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