JPS6240431A - Electrochromic element - Google Patents

Electrochromic element

Info

Publication number
JPS6240431A
JPS6240431A JP18024785A JP18024785A JPS6240431A JP S6240431 A JPS6240431 A JP S6240431A JP 18024785 A JP18024785 A JP 18024785A JP 18024785 A JP18024785 A JP 18024785A JP S6240431 A JPS6240431 A JP S6240431A
Authority
JP
Japan
Prior art keywords
layer
electrochromic
type
electrode
intermediate insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18024785A
Other languages
Japanese (ja)
Inventor
Ryoji Fujiwara
良治 藤原
Kazuya Ishiwatari
和也 石渡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP18024785A priority Critical patent/JPS6240431A/en
Publication of JPS6240431A publication Critical patent/JPS6240431A/en
Pending legal-status Critical Current

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  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

PURPOSE:To obtain the titled element (ECD) having a high memory and an excellent speed, life (duration) by using p-i-n type structure to an intermediate insulating layer of whole solid-state type thin film laminated ECD element. CONSTITUTION:The titled element is ocnstituted fundamentally of a transparent substrate 1, the 1st electrode 2 composed of a transparent electroconductive film, an electrochromic layer 3 of an oxidative coloring layer, an intermediate insulating layer 4, the 2nd electrochromic layer of a reductive coloring layer and the 2nd electrode 6 composed of an electroconductive film by laminating the prescribed layers in order. Thus, the intermediate insulating layer 4 is composed of three layers composed of a n-type layer 41, an i-type layer 42 and a p-type layer 43. For example, the titled layer is prepared by laminating the transparent substrate 1 made of a glass plate, the 1st transparent electrode 2 made of ITO, the oxidative coloring electrochromic layer 3 made of WO3, and intermediate insulating layer 4, the reductive coloring electrochromic layer 5 made of an iridium oxide and the 2nd transparent electrode 6 made of ITO in order. The intermediate layer 4 is constituted of the three layers comprising the layer 41 composed of Ta2O3, the layer 42 composed of SiO2, and the layer 43 composed of the Cr2O3 thin film.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は、全固体薄膜積層型エレクトロクロミック素子
(以下ECDと略称する)に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to an all-solid thin film stacked electrochromic device (hereinafter abbreviated as ECD).

〔発明の背景〕[Background of the invention]

電気信号による可逆的な電気化学反応(酸化・還元反応
)の誘起で生ずる光吸収変化をエレクトロクロミック現
象と呼び、この現象を用いた表示素子をエレクトロクロ
ミック表示素子(ECD )と称する。
A change in light absorption caused by induction of a reversible electrochemical reaction (oxidation/reduction reaction) by an electrical signal is called an electrochromic phenomenon, and a display element using this phenomenon is called an electrochromic display element (ECD).

ECDは大きく液体型と固体型に分類され、セグメント
表示、マトリクス表示、光学シャッタ、絞り機構等に応
用が期待されている。
ECDs are broadly classified into liquid type and solid type, and are expected to be applied to segment displays, matrix displays, optical shutters, aperture mechanisms, etc.

第2図に固体薄膜積層型ECDの従来の構成例を示す。FIG. 2 shows an example of a conventional structure of a solid thin film stacked type ECD.

この素子は、透明な基板1の上に透明4電膜よりなる第
1電極2、酸化発色層であるエレクトロクロミック層3
、中間絶縁層4、還元発色層である第2のエレクトロク
ロミック層5、導電膜よシなる第2を極6を逐次積層し
て構成される。
This device consists of a transparent substrate 1, a first electrode 2 made of a transparent 4-electrode film, and an electrochromic layer 3 which is an oxidized coloring layer.
, an intermediate insulating layer 4, a second electrochromic layer 5 which is a reduction coloring layer, and a second electrode 6 which is a conductive film are successively laminated.

上記の構造において、基板1は一般的にガラス板によっ
て形成されるが、これはガラス板に限らず、プラスチッ
ク板またはアクリル板等の透明な板ならばよく、!九そ
の位置に関しても、第1電極2の下ではなく、第2這極
6の上にあってもよいし、目的に応じて(例えば保護カ
バーとするなどの目的で)両側に設けてもよい。ただし
、これらの場合に応じて第2電極6と透明導電膜にした
シ、両側の電極とも透明導電膜にする必要がある。
In the above structure, the substrate 1 is generally formed of a glass plate, but this is not limited to a glass plate, and may be any transparent plate such as a plastic plate or an acrylic plate! (9) Regarding its position, it may be placed above the second electrode 6 instead of under the first electrode 2, or it may be provided on both sides depending on the purpose (for example, for the purpose of serving as a protective cover). . However, depending on these cases, it is necessary to make the second electrode 6 and the transparent conductive film, and also to make the electrodes on both sides transparent conductive films.

両方の電極を透明F!!極とすれば、透明型素子ができ
る。
Transparent F for both electrodes! ! If it is used as a pole, a transparent element can be created.

絶縁層4は誘fI体のみではなく、固体電解質等のよう
なものでもよい。
The insulating layer 4 is not limited to dielectric material, but may also be made of solid electrolyte or the like.

この様な構造をもつエレクトロクロミック素子は、第1
T!極2と第2電極6の間に電圧を印加することにより
電気化学的反応が起き、着色・消色をする。この着色機
構は、例えばエレクトロクロミック層3へのプロトンと
電子のダブルインジェクションによるブロンズ形成にあ
ると一般的に言われている。例えば、エレクトロクロミ
ック物質として、wo、1用いる場合には、次の(1)
式で表わされる酸化還元反応が起き着色する。
An electrochromic element with such a structure has a first
T! By applying a voltage between the electrode 2 and the second electrode 6, an electrochemical reaction occurs, resulting in coloring and decoloring. It is generally said that this coloring mechanism is based on the formation of bronze by double injection of protons and electrons into the electrochromic layer 3, for example. For example, when using wo,1 as an electrochromic substance, the following (1)
The oxidation-reduction reaction expressed by the formula occurs, resulting in color.

兜+ xH++ xe−≠HxWOs      (1
)(1)式に従って、タングステンブロンズHxWo 
3 カ形成され着色するが、ここで印加電圧を逆転すれ
は消色状態となる。(1)式のこの様な反応は、エレク
トロクロミック素子においては、素子内部の絶縁1−に
よってプロトン肋が供給され着色する。
Kabuto + xH++ xe-≠HxWOs (1
) According to formula (1), tungsten bronze HxWo
3. The color is formed and colored, but if the applied voltage is reversed at this point, the color disappears. In an electrochromic device, such a reaction of formula (1) is caused by proton ribs being supplied by the insulation 1- inside the device and causing coloration.

上述のエレクトロクロミック素子においては、従来陽極
側発色層であるエレクトロクロミック層5は酸化イリジ
ウム(IrO)等のP型遷移金属酸化物を反応性スパッ
タ法或いは陽極酸化膜法にて形成している。
In the above-mentioned electrochromic element, the electrochromic layer 5, which is the anode-side coloring layer, is conventionally formed of a P-type transition metal oxide such as iridium oxide (IrO) by a reactive sputtering method or an anodic oxide film method.

絶縁層4は電極からの電子の注入をブロッキングかつイ
オンを通過させるいわば電解質的な役目をはだす層であ
るが、従来のようt’−Ta205等一層のみではこの
ブロッキングが充分に行なわれ得す、素子としての応答
速度・寿命を低下させる欠点をもっていた。
The insulating layer 4 is a layer that acts as an electrolyte, blocking the injection of electrons from the electrode and allowing ions to pass through, but this blocking cannot be sufficiently performed with only one layer such as t'-Ta205 as in the past. However, it had the disadvantage of reducing the response speed and lifespan of the device.

〔発明の目的〕[Purpose of the invention]

本発明の目的は、全固体薄膜積層型エレクトロクロミッ
ク素子(ECD )を改良し、特にメモリー表示品位・
応答速度・寿命等の特性を改善し、さらに消費電力を低
減せしめたECDを提供することにある0 〔発明の概要〕 本発明の特徴とするところは、上記のような全固体薄膜
積層型エレクトロクロミック素子において、プロトン供
与および電子ブロッキングを行う上記の中間絶縁層をp
−1−nの3層積層構成としたことにある。
The purpose of the present invention is to improve an all-solid-state thin film stacked electrochromic device (ECD), and in particular to improve memory display quality and
[Summary of the Invention] The present invention is characterized by the above-mentioned all-solid-state thin film laminated electronic device. In the chromic element, the above intermediate insulating layer that performs proton donation and electron blocking is
-1-n three-layer laminated structure.

中間絶縁層とp−1−nの3層構造にする理由は次の通
りである。
The reason for the three-layer structure of the intermediate insulating layer and p-1-n is as follows.

ECDの着消色は前述のように、陰極側では肋と電子の
ダブルインジェクションによりWO3+ xI(++ 
x@−−+  HxWO5(e :1[子)なる反応で
起こる。これに対する補償反応(酸化)として陽極側で
は I r Oy + Z OH’″十Zh −)  Ir
ey(OH)、      (2)(h:正孔(ホール
)) なる反応が起こるものと考えられている。
As mentioned above, the coloring and decoloring of ECD is performed by double injection of ribs and electrons on the cathode side to produce WO3+ xI (++
This reaction occurs as follows: x@--+ HxWO5 (e: 1 [child)]. As a compensatory reaction (oxidation) for this, on the anode side I r Oy + Z OH''' + Zh -) Ir
It is thought that the following reaction occurs: ey (OH), (2) (h: hole).

尚(1) (2)式で着消色に関与しているH” +o
H−は素子内に含まれる吸着水が供給源となっている。
Furthermore, in equations (1) and (2), H” + o, which is involved in coloring and decoloring.
The H- source is adsorbed water contained within the element.

そこで例えば素子の応答性を向上させるためにハ、WO
3側ではH+および電子のモビリティ−を、Ir0X側
ではOH−および正孔のモビリティ−?高めてやればよ
いわけである。
Therefore, for example, in order to improve the response of the element,
H+ and electron mobility on the 3 side, and OH- and hole mobility on the Ir0X side. All you have to do is raise it.

計およびOH−は素子のH2O竜で決まり、応答はH”
 、 OH−およびそれに対応する電子・正孔のモビリ
ティ−状態密度に依存している。成解液タイグのECD
を考えた場合、中間絶縁層は、電子的には完壁にブロッ
キングされてbる。しかし本発明のECのタイプはある
程度電子的であるものと考えられる。そこで上記のよう
にWO3型はn型、IrOx側はp型、その中間は接合
がつながるようにl型とすることにより応答が改善され
る。
The meter and OH- are determined by the H2O dragon of the element, and the response is H”
, OH- and the corresponding electron/hole mobility - depends on the density of states. ECD of decomposition liquid Taigu
When considering this, the intermediate insulating layer is completely electronically blocked. However, the type of EC of the present invention is considered to be electronic to some extent. Therefore, as described above, the response is improved by making the WO3 type n-type, the IrOx side p-type, and the middle part between them to be l-type so that the junction is connected.

〔発明の実施例〕[Embodiments of the invention]

以下、本発明を実施例について説明する。第1図は本発
明によるエレクトロクロミック素子の構成の一例を示す
。第1図に示すエレクトロクロミック素子は基本的に第
2図に示すものと同様に、透明な基板1と、透明導電膜
よシなる第1電極2と、酸化発色層であるエレクトロク
ロミック層3と、中間絶縁層4と、還元発色層である第
2のエレクトロクロミック層と、導電膜よシなる第2電
極6を逐次積層して構成される。
Hereinafter, the present invention will be explained with reference to examples. FIG. 1 shows an example of the structure of an electrochromic device according to the present invention. The electrochromic device shown in FIG. 1 is basically the same as the one shown in FIG. , an intermediate insulating layer 4, a second electrochromic layer which is a reduction coloring layer, and a second electrode 6 which is a conductive film are successively laminated.

本発明においては、中間絶縁層4は、n型の層41とi
型の7!42とp型の層43の3層によって構成されて
いる。
In the present invention, the intermediate insulating layer 4 includes an n-type layer 41 and an i
It is composed of three layers: a type 7!42 and a p-type layer 43.

〔実施例1〕 ガラス製の透明基板1、ITOよりなる第1透明電[2
、WO3よりなる酸化発色側エレクトロクロミック層3
、中間絶縁層4、酸化イリジウム(IrOx膜)よシな
る還元発色側エレクトロクロミック層5、およびITO
よシなる第2透明を極6を積層してエレクトロクロミッ
ク素子を作成した。
[Example 1] A transparent substrate 1 made of glass, a first transparent electrode [2] made of ITO
, oxidation coloring side electrochromic layer 3 made of WO3
, an intermediate insulating layer 4, a reduction coloring side electrochromic layer 5 such as iridium oxide (IrOx film), and ITO.
An electrochromic device was prepared by laminating the electrode 6 with a second transparent material.

中間絶縁層4は、Ta2O3よシなる層41、S r 
02よりなる層42、Cr2O3薄膜よりなる層430
3層構成とした。
The intermediate insulating layer 4 is a layer 41 made of Ta2O3, S r
A layer 42 made of 02, a layer 430 made of a Cr2O3 thin film
It has a three-layer structure.

上記の素子を作成するにあたって、電極2および6は反
応性RFイオンブレーティング法で、層3および4は電
子ビーム蒸着法で、層5は反応性ス・孕ツタリング法で
作製した。
In producing the above device, electrodes 2 and 6 were produced by a reactive RF ion blating method, layers 3 and 4 by an electron beam evaporation method, and layer 5 by a reactive starching method.

膜厚は次の通りであった。The film thickness was as follows.

透明電極2  :  100OX エレクトロクロミックjt53:4000i中間絶縁層
4 41  :  300X 42  :  300X 43  :  3001 エレクトロクロミック層5ニア00X 電  極  6   :   100OXなお層4のT
tL205はn型、Cr2O3はp型であることが熱起
電力のシグナルによシ判定でき、またS t O2は〜
1O−14s−crn−1という導電率でほぼi型であ
るといえる。
Transparent electrode 2: 100OX Electrochromic jt53: 4000i Intermediate insulating layer 4 41: 300X 42: 300X 43: 3001 Electrochromic layer 5 near 00X Electrode 6: 100OX T of layer 4
It can be determined from the thermoelectromotive force signal that tL205 is n-type and Cr2O3 is p-type, and S t O2 is ~
With a conductivity of 1O-14s-crn-1, it can be said to be approximately i-type.

以上のように作製した本発明のエレクトロクロミック素
子の着消色特性と、従来の型のTa205−らかに着色
濃度も、応答速度も向上しており、寿命も従来のものと
比較して1ケタ程度向上した。
The coloring/decoloring properties of the electrochromic device of the present invention prepared as described above and the conventional Ta205 type are clearly improved in color density and response speed, and the lifespan is 1 times longer than that of the conventional type. Improved by an order of magnitude.

〔実施例2〕 〔実施例1〕のエレクトロクコミック素子において、層
41をZrO2、層42を5i02、層43をNl (
OH)2薄膜としたところ同様に素子のEC特性が向上
した。
[Example 2] In the electrocomic element of [Example 1], the layer 41 was made of ZrO2, the layer 42 was made of 5i02, and the layer 43 was made of Nl (
When the OH)2 thin film was used, the EC characteristics of the device were similarly improved.

〔発明の効果〕〔Effect of the invention〕

以上説明したように、本発明は、全固体薄膜積層型エレ
クトロクロミック素子の中間絶縁層をp−1−n構造と
することにより、還元発色層、酸化発色層間の電子的ポ
テンシャルおよび化学ポテンシャルの傾きをなだらかに
し、メモリ性の高く、速度寿命にすぐれたECDを作成
することができた。
As explained above, the present invention provides a p-1-n structure for the intermediate insulating layer of an all-solid-state thin film stacked electrochromic device, thereby increasing the slope of the electronic potential and chemical potential between the reduction coloring layer and the oxidation coloring layer. It was possible to create an ECD with a smooth curve, high memory performance, and excellent speed life.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明に係る全固体薄膜積層型エレクトロクロ
ミック素子の構成の一例を示す断面図、2図に示すエレ
クトロクロミック素子の着消色特性を比較して示す図で
ある。 1・・・基板       2・・・第1電極3・・・
エレクトロクロミック層(酸化発色層)4・・・中間絶
縁層 5・・・エレクトロクロミック層(還元発色層)6・・
・第2電極 新  部  興  冶 第3図 第4図
FIG. 1 is a sectional view showing an example of the structure of an all-solid-state thin film laminated electrochromic device according to the present invention, and FIG. 2 is a diagram showing a comparison of the coloring/decoloring characteristics of the electrochromic device shown in FIG. 1... Substrate 2... First electrode 3...
Electrochromic layer (oxidation coloring layer) 4... Intermediate insulating layer 5... Electrochromic layer (reduction coloring layer) 6...
・Second electrode Koji Shinbu Figure 3 Figure 4

Claims (1)

【特許請求の範囲】 1、全固体薄膜積層型エレクトロクロミック素子におい
て、プロトン供与および電子ブロッキングを行なう中間
絶縁層をp−i−nの3層構成にしたことを特徴とする
エレクトロクロミック素子。 2、上記中間絶縁層の構成成分が酸化物であることを特
徴とした特許請求の範囲第1項記載のエレクトロクロミ
ック素子。
[Scope of Claims] 1. An all-solid-state thin film laminated electrochromic device, characterized in that an intermediate insulating layer for proton donating and electron blocking has a pin three-layer structure. 2. The electrochromic device according to claim 1, wherein the constituent component of the intermediate insulating layer is an oxide.
JP18024785A 1985-08-16 1985-08-16 Electrochromic element Pending JPS6240431A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18024785A JPS6240431A (en) 1985-08-16 1985-08-16 Electrochromic element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18024785A JPS6240431A (en) 1985-08-16 1985-08-16 Electrochromic element

Publications (1)

Publication Number Publication Date
JPS6240431A true JPS6240431A (en) 1987-02-21

Family

ID=16079936

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18024785A Pending JPS6240431A (en) 1985-08-16 1985-08-16 Electrochromic element

Country Status (1)

Country Link
JP (1) JPS6240431A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006101224A1 (en) * 2005-03-19 2006-09-28 National University Corporation Tokyo University Of Agriculture And Technology Reversible coloring/decoloring solid element, reversible conductive change solid element, reversible refractivity change solid element, non-light emitting display element, electric connection path element, and optical waveguide element
JP2008203740A (en) * 2007-02-22 2008-09-04 Nissan Motor Co Ltd Dimming element and dimming device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006101224A1 (en) * 2005-03-19 2006-09-28 National University Corporation Tokyo University Of Agriculture And Technology Reversible coloring/decoloring solid element, reversible conductive change solid element, reversible refractivity change solid element, non-light emitting display element, electric connection path element, and optical waveguide element
JP2008203740A (en) * 2007-02-22 2008-09-04 Nissan Motor Co Ltd Dimming element and dimming device

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