JPS6238532U - - Google Patents

Info

Publication number
JPS6238532U
JPS6238532U JP12953685U JP12953685U JPS6238532U JP S6238532 U JPS6238532 U JP S6238532U JP 12953685 U JP12953685 U JP 12953685U JP 12953685 U JP12953685 U JP 12953685U JP S6238532 U JPS6238532 U JP S6238532U
Authority
JP
Japan
Prior art keywords
storage chamber
sound absorbing
chamber
clean room
air purification
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12953685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12953685U priority Critical patent/JPS6238532U/ja
Publication of JPS6238532U publication Critical patent/JPS6238532U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP12953685U 1985-08-27 1985-08-27 Pending JPS6238532U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12953685U JPS6238532U (zh) 1985-08-27 1985-08-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12953685U JPS6238532U (zh) 1985-08-27 1985-08-27

Publications (1)

Publication Number Publication Date
JPS6238532U true JPS6238532U (zh) 1987-03-07

Family

ID=31026190

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12953685U Pending JPS6238532U (zh) 1985-08-27 1985-08-27

Country Status (1)

Country Link
JP (1) JPS6238532U (zh)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6071833A (ja) * 1983-09-29 1985-04-23 Hitachi Plant Eng & Constr Co Ltd 分解式送風装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6071833A (ja) * 1983-09-29 1985-04-23 Hitachi Plant Eng & Constr Co Ltd 分解式送風装置

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