Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JCU Corp
Original Assignee
Ebara Udylite Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Udylite Co LtdfiledCriticalEbara Udylite Co Ltd
Priority to JP3650486ApriorityCriticalpatent/JPS621881A/ja
Publication of JPS621881ApublicationCriticalpatent/JPS621881A/ja
Publication of JPS6238433B2publicationCriticalpatent/JPS6238433B2/ja