JPS6237922U - - Google Patents
Info
- Publication number
- JPS6237922U JPS6237922U JP1985129750U JP12975085U JPS6237922U JP S6237922 U JPS6237922 U JP S6237922U JP 1985129750 U JP1985129750 U JP 1985129750U JP 12975085 U JP12975085 U JP 12975085U JP S6237922 U JPS6237922 U JP S6237922U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- chamber
- substrate
- plasma cvd
- cvd apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985129750U JPS6237922U (enExample) | 1985-08-26 | 1985-08-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985129750U JPS6237922U (enExample) | 1985-08-26 | 1985-08-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6237922U true JPS6237922U (enExample) | 1987-03-06 |
Family
ID=31026602
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985129750U Pending JPS6237922U (enExample) | 1985-08-26 | 1985-08-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6237922U (enExample) |
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1985
- 1985-08-26 JP JP1985129750U patent/JPS6237922U/ja active Pending