JPS6237079U - - Google Patents
Info
- Publication number
- JPS6237079U JPS6237079U JP12931885U JP12931885U JPS6237079U JP S6237079 U JPS6237079 U JP S6237079U JP 12931885 U JP12931885 U JP 12931885U JP 12931885 U JP12931885 U JP 12931885U JP S6237079 U JPS6237079 U JP S6237079U
- Authority
- JP
- Japan
- Prior art keywords
- molecular beam
- shutter
- shutter plate
- cell
- crystal growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims description 2
- 238000001451 molecular beam epitaxy Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985129318U JPH033580Y2 (cg-RX-API-DMAC7.html) | 1985-08-23 | 1985-08-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985129318U JPH033580Y2 (cg-RX-API-DMAC7.html) | 1985-08-23 | 1985-08-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6237079U true JPS6237079U (cg-RX-API-DMAC7.html) | 1987-03-05 |
| JPH033580Y2 JPH033580Y2 (cg-RX-API-DMAC7.html) | 1991-01-30 |
Family
ID=31025789
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985129318U Expired JPH033580Y2 (cg-RX-API-DMAC7.html) | 1985-08-23 | 1985-08-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH033580Y2 (cg-RX-API-DMAC7.html) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5694730A (en) * | 1979-12-28 | 1981-07-31 | Nec Corp | Preparation method of compound semiconductor thin film |
-
1985
- 1985-08-23 JP JP1985129318U patent/JPH033580Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5694730A (en) * | 1979-12-28 | 1981-07-31 | Nec Corp | Preparation method of compound semiconductor thin film |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH033580Y2 (cg-RX-API-DMAC7.html) | 1991-01-30 |