JPS6236537U - - Google Patents
Info
- Publication number
- JPS6236537U JPS6236537U JP12690185U JP12690185U JPS6236537U JP S6236537 U JPS6236537 U JP S6236537U JP 12690185 U JP12690185 U JP 12690185U JP 12690185 U JP12690185 U JP 12690185U JP S6236537 U JPS6236537 U JP S6236537U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- chuck table
- rotates
- holding
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 5
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000007664 blowing Methods 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12690185U JPS6236537U (es) | 1985-08-20 | 1985-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12690185U JPS6236537U (es) | 1985-08-20 | 1985-08-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6236537U true JPS6236537U (es) | 1987-03-04 |
Family
ID=31021140
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12690185U Pending JPS6236537U (es) | 1985-08-20 | 1985-08-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6236537U (es) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0564784U (ja) * | 1992-02-05 | 1993-08-27 | 株式会社東京精密 | 圧力素子測定用圧力印加ステージ |
-
1985
- 1985-08-20 JP JP12690185U patent/JPS6236537U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0564784U (ja) * | 1992-02-05 | 1993-08-27 | 株式会社東京精密 | 圧力素子測定用圧力印加ステージ |