JPS6236343U - - Google Patents

Info

Publication number
JPS6236343U
JPS6236343U JP12853185U JP12853185U JPS6236343U JP S6236343 U JPS6236343 U JP S6236343U JP 12853185 U JP12853185 U JP 12853185U JP 12853185 U JP12853185 U JP 12853185U JP S6236343 U JPS6236343 U JP S6236343U
Authority
JP
Japan
Prior art keywords
filter unit
blower
outer frame
clean room
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12853185U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12853185U priority Critical patent/JPS6236343U/ja
Publication of JPS6236343U publication Critical patent/JPS6236343U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP12853185U 1985-08-23 1985-08-23 Pending JPS6236343U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12853185U JPS6236343U (enrdf_load_stackoverflow) 1985-08-23 1985-08-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12853185U JPS6236343U (enrdf_load_stackoverflow) 1985-08-23 1985-08-23

Publications (1)

Publication Number Publication Date
JPS6236343U true JPS6236343U (enrdf_load_stackoverflow) 1987-03-04

Family

ID=31024287

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12853185U Pending JPS6236343U (enrdf_load_stackoverflow) 1985-08-23 1985-08-23

Country Status (1)

Country Link
JP (1) JPS6236343U (enrdf_load_stackoverflow)

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