JPS623572U - - Google Patents

Info

Publication number
JPS623572U
JPS623572U JP9430485U JP9430485U JPS623572U JP S623572 U JPS623572 U JP S623572U JP 9430485 U JP9430485 U JP 9430485U JP 9430485 U JP9430485 U JP 9430485U JP S623572 U JPS623572 U JP S623572U
Authority
JP
Japan
Prior art keywords
target
backing plate
sputtering
pedestal
locked
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9430485U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9430485U priority Critical patent/JPS623572U/ja
Publication of JPS623572U publication Critical patent/JPS623572U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9430485U 1985-06-21 1985-06-21 Pending JPS623572U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9430485U JPS623572U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-06-21 1985-06-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9430485U JPS623572U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-06-21 1985-06-21

Publications (1)

Publication Number Publication Date
JPS623572U true JPS623572U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-01-10

Family

ID=30652742

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9430485U Pending JPS623572U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-06-21 1985-06-21

Country Status (1)

Country Link
JP (1) JPS623572U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

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