JPS6235268U - - Google Patents
Info
- Publication number
- JPS6235268U JPS6235268U JP12665285U JP12665285U JPS6235268U JP S6235268 U JPS6235268 U JP S6235268U JP 12665285 U JP12665285 U JP 12665285U JP 12665285 U JP12665285 U JP 12665285U JP S6235268 U JPS6235268 U JP S6235268U
- Authority
- JP
- Japan
- Prior art keywords
- probe card
- probe
- hole
- main body
- probes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 12
- 239000011324 bead Substances 0.000 claims 1
- 230000001747 exhibiting effect Effects 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 229910000859 α-Fe Inorganic materials 0.000 claims 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案のプローブカードの１実施例の
平面図、第２図は第１図中の―部分の断面図
である。
１…プローブカード本体、２，３，４…複数の
プローブ、７…筒体。
FIG. 1 is a plan view of one embodiment of the probe card of the present invention, and FIG. 2 is a cross-sectional view of the portion shown in FIG. 1... Probe card body, 2, 3, 4... Plural probes, 7... Cylindrical body.
Claims (1)
ローブカード本体に固定されており前記透孔を通
して下方に突出されている複数のプローブとを備
えてなるプローブカードにおいて、前記複数のプ
ローブのうち少くとも１つのプローブに高誘電率
を呈する材料よりなる筒体を装着していることを
特徴とするプローブカード。 (2) 前記筒体はフエライトビーズである実用新
案登録請求の範囲第(1)項記載のプローブカード
。 (3) 前記筒体を有するプローブはＦＥＴのゲー
ト電極及び若しくはドレイン電極に対応するもの
である実用新案登録請求の範囲第(1)項記載のプ
ローブカード。[Claims for Utility Model Registration] (1) A probe card comprising a probe card main body having a through hole and a plurality of probes fixed to the probe card main body and protruding downward through the through hole. . A probe card, wherein at least one of the plurality of probes is equipped with a cylinder made of a material exhibiting a high dielectric constant. (2) The probe card according to claim (1), wherein the cylinder is a ferrite bead. (3) The probe card according to claim (1), wherein the probe having the cylindrical body corresponds to a gate electrode and/or a drain electrode of an FET.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12665285U JPS6235268U (en) | 1985-08-20 | 1985-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12665285U JPS6235268U (en) | 1985-08-20 | 1985-08-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6235268U true JPS6235268U (en) | 1987-03-02 |
Family
ID=31020659
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12665285U Pending JPS6235268U (en) | 1985-08-20 | 1985-08-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6235268U (en) |
-
1985
- 1985-08-20 JP JP12665285U patent/JPS6235268U/ja active Pending