JPS6235102U - - Google Patents

Info

Publication number
JPS6235102U
JPS6235102U JP12652885U JP12652885U JPS6235102U JP S6235102 U JPS6235102 U JP S6235102U JP 12652885 U JP12652885 U JP 12652885U JP 12652885 U JP12652885 U JP 12652885U JP S6235102 U JPS6235102 U JP S6235102U
Authority
JP
Japan
Prior art keywords
pressure chamber
atmospheric pressure
diaphragm
side wall
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12652885U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0326325Y2 (fi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12652885U priority Critical patent/JPH0326325Y2/ja
Publication of JPS6235102U publication Critical patent/JPS6235102U/ja
Application granted granted Critical
Publication of JPH0326325Y2 publication Critical patent/JPH0326325Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Actuator (AREA)
JP12652885U 1985-08-21 1985-08-21 Expired JPH0326325Y2 (fi)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12652885U JPH0326325Y2 (fi) 1985-08-21 1985-08-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12652885U JPH0326325Y2 (fi) 1985-08-21 1985-08-21

Publications (2)

Publication Number Publication Date
JPS6235102U true JPS6235102U (fi) 1987-03-02
JPH0326325Y2 JPH0326325Y2 (fi) 1991-06-07

Family

ID=31020412

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12652885U Expired JPH0326325Y2 (fi) 1985-08-21 1985-08-21

Country Status (1)

Country Link
JP (1) JPH0326325Y2 (fi)

Also Published As

Publication number Publication date
JPH0326325Y2 (fi) 1991-06-07

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