JPS6235102U - - Google Patents
Info
- Publication number
- JPS6235102U JPS6235102U JP12652885U JP12652885U JPS6235102U JP S6235102 U JPS6235102 U JP S6235102U JP 12652885 U JP12652885 U JP 12652885U JP 12652885 U JP12652885 U JP 12652885U JP S6235102 U JPS6235102 U JP S6235102U
- Authority
- JP
- Japan
- Prior art keywords
- pressure chamber
- atmospheric pressure
- diaphragm
- side wall
- housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Actuator (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12652885U JPH0326325Y2 (fi) | 1985-08-21 | 1985-08-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12652885U JPH0326325Y2 (fi) | 1985-08-21 | 1985-08-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6235102U true JPS6235102U (fi) | 1987-03-02 |
JPH0326325Y2 JPH0326325Y2 (fi) | 1991-06-07 |
Family
ID=31020412
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12652885U Expired JPH0326325Y2 (fi) | 1985-08-21 | 1985-08-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0326325Y2 (fi) |
-
1985
- 1985-08-21 JP JP12652885U patent/JPH0326325Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPH0326325Y2 (fi) | 1991-06-07 |