JPS6235102U - - Google Patents

Info

Publication number
JPS6235102U
JPS6235102U JP12652885U JP12652885U JPS6235102U JP S6235102 U JPS6235102 U JP S6235102U JP 12652885 U JP12652885 U JP 12652885U JP 12652885 U JP12652885 U JP 12652885U JP S6235102 U JPS6235102 U JP S6235102U
Authority
JP
Japan
Prior art keywords
pressure chamber
atmospheric pressure
diaphragm
side wall
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12652885U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0326325Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12652885U priority Critical patent/JPH0326325Y2/ja
Publication of JPS6235102U publication Critical patent/JPS6235102U/ja
Application granted granted Critical
Publication of JPH0326325Y2 publication Critical patent/JPH0326325Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Actuator (AREA)
JP12652885U 1985-08-21 1985-08-21 Expired JPH0326325Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12652885U JPH0326325Y2 (enrdf_load_stackoverflow) 1985-08-21 1985-08-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12652885U JPH0326325Y2 (enrdf_load_stackoverflow) 1985-08-21 1985-08-21

Publications (2)

Publication Number Publication Date
JPS6235102U true JPS6235102U (enrdf_load_stackoverflow) 1987-03-02
JPH0326325Y2 JPH0326325Y2 (enrdf_load_stackoverflow) 1991-06-07

Family

ID=31020412

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12652885U Expired JPH0326325Y2 (enrdf_load_stackoverflow) 1985-08-21 1985-08-21

Country Status (1)

Country Link
JP (1) JPH0326325Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0326325Y2 (enrdf_load_stackoverflow) 1991-06-07

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