JPS6235101U - - Google Patents

Info

Publication number
JPS6235101U
JPS6235101U JP12652785U JP12652785U JPS6235101U JP S6235101 U JPS6235101 U JP S6235101U JP 12652785 U JP12652785 U JP 12652785U JP 12652785 U JP12652785 U JP 12652785U JP S6235101 U JPS6235101 U JP S6235101U
Authority
JP
Japan
Prior art keywords
pressure chamber
atmospheric pressure
diaphragm
hole
sliding movement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12652785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12652785U priority Critical patent/JPS6235101U/ja
Publication of JPS6235101U publication Critical patent/JPS6235101U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Actuator (AREA)
JP12652785U 1985-08-21 1985-08-21 Pending JPS6235101U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12652785U JPS6235101U (fr) 1985-08-21 1985-08-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12652785U JPS6235101U (fr) 1985-08-21 1985-08-21

Publications (1)

Publication Number Publication Date
JPS6235101U true JPS6235101U (fr) 1987-03-02

Family

ID=31020410

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12652785U Pending JPS6235101U (fr) 1985-08-21 1985-08-21

Country Status (1)

Country Link
JP (1) JPS6235101U (fr)

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