JPS6234426U - - Google Patents

Info

Publication number
JPS6234426U
JPS6234426U JP12536385U JP12536385U JPS6234426U JP S6234426 U JPS6234426 U JP S6234426U JP 12536385 U JP12536385 U JP 12536385U JP 12536385 U JP12536385 U JP 12536385U JP S6234426 U JPS6234426 U JP S6234426U
Authority
JP
Japan
Prior art keywords
resist
conveyance path
conveyance
conveying device
coater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12536385U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12536385U priority Critical patent/JPS6234426U/ja
Publication of JPS6234426U publication Critical patent/JPS6234426U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP12536385U 1985-08-14 1985-08-14 Pending JPS6234426U (ro)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12536385U JPS6234426U (ro) 1985-08-14 1985-08-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12536385U JPS6234426U (ro) 1985-08-14 1985-08-14

Publications (1)

Publication Number Publication Date
JPS6234426U true JPS6234426U (ro) 1987-02-28

Family

ID=31018202

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12536385U Pending JPS6234426U (ro) 1985-08-14 1985-08-14

Country Status (1)

Country Link
JP (1) JPS6234426U (ro)

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