JPS6234342U - - Google Patents
Info
- Publication number
- JPS6234342U JPS6234342U JP12568085U JP12568085U JPS6234342U JP S6234342 U JPS6234342 U JP S6234342U JP 12568085 U JP12568085 U JP 12568085U JP 12568085 U JP12568085 U JP 12568085U JP S6234342 U JPS6234342 U JP S6234342U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- hood
- gas supply
- detects
- flow meter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12568085U JPS6234342U (de) | 1985-08-19 | 1985-08-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12568085U JPS6234342U (de) | 1985-08-19 | 1985-08-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6234342U true JPS6234342U (de) | 1987-02-28 |
Family
ID=31018786
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12568085U Pending JPS6234342U (de) | 1985-08-19 | 1985-08-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6234342U (de) |
-
1985
- 1985-08-19 JP JP12568085U patent/JPS6234342U/ja active Pending
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