JPS6233681U - - Google Patents
Info
- Publication number
- JPS6233681U JPS6233681U JP12275685U JP12275685U JPS6233681U JP S6233681 U JPS6233681 U JP S6233681U JP 12275685 U JP12275685 U JP 12275685U JP 12275685 U JP12275685 U JP 12275685U JP S6233681 U JPS6233681 U JP S6233681U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- magnet
- transmission shaft
- wall side
- support body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 claims description 12
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12275685U JPS6233681U (ko) | 1985-08-12 | 1985-08-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12275685U JPS6233681U (ko) | 1985-08-12 | 1985-08-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6233681U true JPS6233681U (ko) | 1987-02-27 |
Family
ID=31013248
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12275685U Pending JPS6233681U (ko) | 1985-08-12 | 1985-08-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6233681U (ko) |
-
1985
- 1985-08-12 JP JP12275685U patent/JPS6233681U/ja active Pending