JPS6233157U - - Google Patents
Info
- Publication number
- JPS6233157U JPS6233157U JP12556985U JP12556985U JPS6233157U JP S6233157 U JPS6233157 U JP S6233157U JP 12556985 U JP12556985 U JP 12556985U JP 12556985 U JP12556985 U JP 12556985U JP S6233157 U JPS6233157 U JP S6233157U
- Authority
- JP
- Japan
- Prior art keywords
- air lock
- chamber
- lock valve
- piston
- cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012856 packing Methods 0.000 claims description 2
- 239000012530 fluid Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12556985U JPS6233157U (enExample) | 1985-08-16 | 1985-08-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12556985U JPS6233157U (enExample) | 1985-08-16 | 1985-08-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6233157U true JPS6233157U (enExample) | 1987-02-27 |
Family
ID=31018578
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12556985U Pending JPS6233157U (enExample) | 1985-08-16 | 1985-08-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6233157U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20240212971A1 (en) * | 2020-03-26 | 2024-06-27 | National Institute For Materials Science | Electron gun chamber for scanning electron microscope, electron gun containing same, and scanning electron microscope |
-
1985
- 1985-08-16 JP JP12556985U patent/JPS6233157U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20240212971A1 (en) * | 2020-03-26 | 2024-06-27 | National Institute For Materials Science | Electron gun chamber for scanning electron microscope, electron gun containing same, and scanning electron microscope |
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