JPS6232531U - - Google Patents
Info
- Publication number
- JPS6232531U JPS6232531U JP12431285U JP12431285U JPS6232531U JP S6232531 U JPS6232531 U JP S6232531U JP 12431285 U JP12431285 U JP 12431285U JP 12431285 U JP12431285 U JP 12431285U JP S6232531 U JPS6232531 U JP S6232531U
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- treatment
- tank
- processing
- processing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12431285U JPS6232531U (OSRAM) | 1985-08-13 | 1985-08-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12431285U JPS6232531U (OSRAM) | 1985-08-13 | 1985-08-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6232531U true JPS6232531U (OSRAM) | 1987-02-26 |
Family
ID=31016209
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12431285U Pending JPS6232531U (OSRAM) | 1985-08-13 | 1985-08-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6232531U (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09181034A (ja) * | 1995-12-18 | 1997-07-11 | Lg Semicon Co Ltd | 半導体ウェーハ洗浄装置及び方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5744685U (OSRAM) * | 1980-08-15 | 1982-03-11 |
-
1985
- 1985-08-13 JP JP12431285U patent/JPS6232531U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5744685U (OSRAM) * | 1980-08-15 | 1982-03-11 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09181034A (ja) * | 1995-12-18 | 1997-07-11 | Lg Semicon Co Ltd | 半導体ウェーハ洗浄装置及び方法 |