JPS6232528U - - Google Patents

Info

Publication number
JPS6232528U
JPS6232528U JP12280185U JP12280185U JPS6232528U JP S6232528 U JPS6232528 U JP S6232528U JP 12280185 U JP12280185 U JP 12280185U JP 12280185 U JP12280185 U JP 12280185U JP S6232528 U JPS6232528 U JP S6232528U
Authority
JP
Japan
Prior art keywords
semiconductor substrate
etching
adhesive layer
support base
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12280185U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12280185U priority Critical patent/JPS6232528U/ja
Publication of JPS6232528U publication Critical patent/JPS6232528U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP12280185U 1985-08-09 1985-08-09 Pending JPS6232528U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12280185U JPS6232528U (enrdf_load_stackoverflow) 1985-08-09 1985-08-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12280185U JPS6232528U (enrdf_load_stackoverflow) 1985-08-09 1985-08-09

Publications (1)

Publication Number Publication Date
JPS6232528U true JPS6232528U (enrdf_load_stackoverflow) 1987-02-26

Family

ID=31013331

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12280185U Pending JPS6232528U (enrdf_load_stackoverflow) 1985-08-09 1985-08-09

Country Status (1)

Country Link
JP (1) JPS6232528U (enrdf_load_stackoverflow)

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